Abstract
This paper presents vibration reduction control of a voice coil motor (VCM) nano scanner. We had developed a VCM scanner. The scanner has flexure hinges structure. However, the VCM nano scanner has some problems of thermal drift and small damping compared to the PZT driven nano scanner. Especially, the small damping coefficient of the VCM scanner causes mechanical vibration when the control input signal is near to the resonance frequencies. Additionally, disturbance to the VCM scanner and electronic noise in the sensor also cause the mechanical vibration when they are near to the resonant frequencies. The mechanical vibration reduces the servo bandwidth as well as the accuracy, which deteriorates the AFM image of the samples. We design a pre-filter to reduce the signal applied to the VCM nano scanner and electronic noise in the sensor whose frequency is closed the resonant frequency of the VCM nano scanner. We measure the time and frequency response of the VCM scanner without using the pre-filter and with using the pre-filter. Finally, the topology images of a bare wafer are measured and compared using the AFM.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
Abbreviations
- k:
-
spring constant of the flexure hinge
- m:
-
mass of the VCM nano scanner
- Gs (s):
-
transfer function of the VCM nano scanner
- Gf (s):
-
transfer function of the pre-filter
- Gscanner(s):
-
transfer function of the compensated scanner
References
Wildeer, K., Quate, C. F., Singh, B. and Kyser, D. F., “Electron beam and scanning probe lithography: a comparision,” J. Vac. Sci. Technol. B, Vol. 16, No. 6, pp. 3864–3873, 1998.
Betzig, E., Trautman, J. K., Wolfe, R., Gyorgy, E. M., Finn, P. L., Kryder, M. H. and Cahang, C. H., “Near-field magneto-optic and high density data storage,” Appl. Phys. Lett., Vol. 61, No. 2, pp. 142–144, 1992.
Lee, D.-J., Lee, K.-K., Park, N.-C. and Park, Y.-P., “Development of 3-axis Nano scanner for precision positioning in lithography system,” Processing of the IEEE, International Conference on Mechatronics & Automation, Vol. 3, pp. 1598–1603, 2005.
Kajihara, Y., Takeuchi, T., Takahashi, S. and Takamasu, K., “Development of an in-process confocal positioning system for nano-stereolithography using Evanescent Light,” International Journal of Precision Engineering and Manufacturing, Vol. 9, No. 3, pp. 51–54, 2008.
Park, J. S. and Jeong, K. W., “A study of the design and conrol system for the ultra-precision stage,” Proceedings of the KSMTE Spring Conference, pp. 54–59, 2005.
Mori, K., Munemoto, T., Otsuki, H., Yamaguchi, Y. and Akagi, K., “A dual-stage magnetic disk drive actuator using a piezoelectric device for a high track density,” IEEE Trans. on Magnetics, Vol. 27, No. 6, pp. 5298–5300, 1991.
Kweon, H. K., “A New Calibration Method of Atomic Force Microscopy,” International Journal of the Korean Society of Precision Engineering, Vol. 2, No. 2, pp. 11–16, 2001.
Jung, H. W. and Gweon, D.-G., “Creep characteristics of PZT stack actuator,” Review of Scientific Instruments, Vol. 71. No. 4, pp. 1896–1900, 2000.
Kim, H.-S., Lee, B.-R. and Park, K.-Y., “Precision Position Control of a Piezoelectric Actuator Using Neural network,” J. of KSPE, Vol. 16, No. 11, pp. 9–15, 1999.
Hong, S. R. and Lee, B. R., “Ultra-Precision Control of Piezoelectric Actuator System Using Hysteresis Compensation,” Proceeding of the KSPE Autumn Conference, pp. 85–88, 2000.
Bloch, F., Lhermet, N., Meneround, P. and Claeyssen, F., “Space Compliant Moving Coil Actuator,” 9th International Conference on New Actuators, pp. 661–664, 2004.
Encica, L., Makarovic, J., Lomonova, E. A. and Vandenput, A. J. A., “Space Mapping Opimawation of a Cylinderical Voice Coil Actuator,” IEEE Trans. on Industry Applications, Vol. 42, No. 6, pp. 1437–1444, 2006.
Kwon, K. H., Oh, S. H., Cho, N. G. and Yoon, J. Y., “Development of small loading and Positioning Device using VCM,” J. of KSPE, Vol. 20, No. 12, pp. 64–72, 2003.
Lee, S.-Q., Kim, E.-K., Youm, W.-S., Park, K.-H., Park, K.-H. and Chetwynd, D., “Bi-direction controllable AFM head driven by VCM with flexure hinge,” Proc. of 4th euspen International Conference European Society for Precision Engineering and Nanotechnology, pp. 83–85, 2004.
Youm, W. S., Lee, S.-Q. and Park, K. H., “Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator,” Proc. of AIM, pp. 325–328, 2005.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Jung, Jk., Youm, Ws. & Park, Kh. Vibration reduction control of a voice coil motor (VCM) nano scanner. Int. J. Precis. Eng. Manuf. 10, 167–170 (2009). https://doi.org/10.1007/s12541-009-0063-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12541-009-0063-7