Abstract
Anodized aluminum oxide (AAO) nanotemplates were prepared using the Al/Si substrates with an aluminum layer thickness of about 300 nm. A two-step anodization process was used to prepare an ordered porous alumina nanotemplate, and the pores of various sizes and depths were constructed electrochemically through anodic oxidation. The optimum morphological structure for large area application was constructed by adjusting the applied potential, temperature, time, and electrolyte concentration. SEM investigations showed that hexagonal-close-packed alumina nano-pore arrays were nicely constructed on Si substrate, having smooth wall morphologies and well-defined diameters. It is also reported that one dimensional copper nanopillars can be fabricated using the tunable nanopore sized AAO/Si template, by controlling the copper deposition process.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
P. Kohli, M. Wirtz and C.R. Martin, Electroanalysis, 16, 9 (2004).
C. T. Kresge, M. E. Leonowicz, W. J. Roth, J. C. Vartuli and J. S. Beck, Nature, 359, 710 (1992).
H. Masuda and K. Fukuda, Science, 268, 1466 (1995).
S. K. Hwang, S. H. Jeong, H.Y. Hwang, O. J. Lee and K. H. Lee, Korean J. Chem. Eng., 19, 467 (2002).
T.Y. Kim and S. H. Jeong, Korean J. Chem. Eng., 25, 609 (2008).
M. Jung, J.W. Choi, Y. K. Kim and B. K. Oh, Korean Chem. Eng. Res., 46, 465 (2008).
Y. Lee and J. Jung, Korean Chem. Eng. Res., 49, 28 (2011).
Y. Li, M. Zheng, L. Ma and W. Shen, Nanotechnology, 17, 5105 (2006).
Y. Ding, Y. J. Kim and J. Erlebacher, Adv. Mater., 16, 1897 (2004).
J. A. Switzer, C. J. Hung, L.Y. Huang, F. Scott Miller, Y. Zhou, E.R. Raub, M.G. Shumsky and E.W. Bohannan, J. Mater. Res., 13, 909 (1998).
K. Faulds, R. E. Littleford, D. Graham, G. Dent and W. E. Smith, Anal. Chem., 76, 592 (2004).
S. Ono, M. Saito and H. Asoh, Electrochem. Solid-State Lett., 7, B21 (2004).
G. K. Singh, A. A. Golovin and I. S. Aranson, Phys. Rev., B 73, 205422 (2006).
H. Asoh, K. Nishio, M. Nakao, A. Yokoo, T. Tamamura and H. Masuda, J. Vac. Sci. Technol., B 19, 569 (2001).
Oihane Sanz, Javier Echave, Jose Antonio Odriozola and Mario Montes, Ind. Eng. Chem. Res., 50, 2117 (2011).
G.C. Wood and J. P. O’sullivan, Electrochim. Acta, 15, 1865 (1970).
S. Setoh and A. Miyata, Sci. Pap. Inst. Phys. Chem. Res., (Jpn.), 17, 189 (1932).
K. Ebihara, H. Takahashi and M. Nagayama, J. Met. Finish. Jpn., 33, 156 (1982).
Feiyue Li, Lan Zhang, Robert and M. Metzger, Chem. Mater., 10, 2470 (1998).
Kathrin Schwirn, Woo Lee, Reinald Hillebrand, Martin Steinhart and Kornelius Nielsch Ulrich Gösele, ACS Nano, 2, 302 (2008).
G. Patermarakis and H. S Karayannis, Electrochim. Acta, 40, 2647 (1995).
G. Patermarakis and N. Nicolopoulos, J. Catal., 187, 311 (1999).
G. Patermarakis and D. Tzouvelekis, Electrochim. Acta, 39, 2419 (1994).
A. Johansson, T. Törndahl, L. M. Ottosson, M. Boman and J. O. Carlsson, Mater. Sci. Eng., C. 23, 823 (2003).
Andreas Keilbach, James Moses, RalfKohn, Markus Doblinger and Thomas Bein, Chem. Mater., 22, 5430 (2010).
Rosalinda Inguanta and Salvatore Piazza Carmelo Sunseri, Appl. Surf. Sci., 255, 8816 (2009).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Shen, L., Ali, M., Gu, Z. et al. Preparation of anodic aluminum oxide (AAO) nano-template on silicon and its application to one-dimensional copper nano-pillar array formation. Korean J. Chem. Eng. 30, 221–227 (2013). https://doi.org/10.1007/s11814-012-0124-y
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11814-012-0124-y