Abstract
This study investigates the fabrication process of Zn-diffused ridge waveguides in periodically poled magnesium-doped lithium niobate (PPMgO: LN). A controlled variable method is used to study the effects of diffusion temperature, diffusion time, ZnO film thickness, and barrier layer thickness on the surface domain depolarization and waveguide quality of PPMgO: LN. A special barrier layer is proposed that can automatically lift off from the sample surface, which increases the depth of Zn doping and reduces the surface loss of the waveguide. By optimizing the process parameters, we fabricate Zn-diffused PPMgO: LN ridge waveguides with a length of 22.80 mm and a period of 18.0 µm. The above waveguides can make a second harmonic generation (SHG) at 775 nm with an output power of 90.20 mW by a pump power of 741 mW at 1 550 nm. The corresponding conversion efficiency is 3.160%/W·cm2, and the waveguide loss is approximately 0.81 dB/cm. These results demonstrate that high-efficiency devices can be obtained through the fabrication process described in this paper.
Article PDF
Similar content being viewed by others
Explore related subjects
Discover the latest articles, news and stories from top researchers in related subjects.Avoid common mistakes on your manuscript.
References
YUAN J, DU J, LIU J, et al. Arayed-waveguide-grating based on proton exchange and etching combined fabrication over bulk lithium-niobate substrate[C]//2022 IEEE 24th International Workshop on Multimedia Signal Processing (MMSP), September 26–28, 2022, Shanghai, China. New York: IEEE, 2022: 1–4.
NIU Y, YAN X, CHEN J, et al. Research progress on periodically poled lithium niobate for nonlinear frequency conversion[J]. Infrared physics & technology, 2022:104243.
TAKUSHI K, TAKESHI U, SHIMPI S, et al. Over-30-dB gain and 1-dB noise figure phase-sensitive amplification using a pump-combiner-integrated fiber I/O PPLN module[J]. Optics express, 2021, 29(18): 28824–28834.
CHEN Z Y, CHENG J X, CHEN H X, et al. High performance Zn diffused Mg doped LN crystal ridge waveguide devices[J]. Journal of synthetic crystals, 2022, 51(11): 1823.
LEWIS G C, SAM A B, ALAN C G, et al. CW demonstration of SHG spectral narrowing in a PPLN waveguide generating 2.5 W at 780 nm[J]. Optics express, 2020, 28(15/20): 21382.
BERRY S A, CARPENTER L G, GRAY A C, et al. Zn-indiffused diced ridge waveguides in MgO: PPLN generating 1 watt 780 nm SHG at 70% efficiency[J]. OSA continuum, 2019, 2(12): 3456–3464.
LU M, CORIN B E G, KATIA G, et al. High conversion efficiency single-pass second harmonic generation in a zinc-diffused periodically poled lithium niobate wave-guide[J]. Optics express, 2005, 13(13): 4862.
ALAN C G, SAM A B, LEWIS G C, et al. Upconversion detection of 1.25 Gb/s mid-infrared telecommunications using a silicon avalanche photodiode[J]. Optics express, 2020, 28(23/9): 34279.
ALAN C G, JONATHAN R C W, LEWIS G C, et al. Zinc-indiffused MgO: PPLN waveguides for blue/UV generation via VECSEL pumping[J]. Applied optics, 2020, 59(16/1): 4921.
ALAN C G, SAM A B, LEWIS G C, et al. Investigation of PPLN waveguide uniformity via second harmonic generation spectra[J]. IEEE photonics technology letters, 2019, 32(1): 1041–1135.
CARPENTER L G, BERRY S A, BANNERMAN R H S, et al. ZnO indiffused MgO: PPLN ridge wave-guides[J]. Optics express, 2019, 27(17): 24538–24544.
GRAY A C, CARPENTER L G, BERRY S A, et al. Development of periodically poled lithium niobate zinc-indiffused ridge waveguides at blue wave-lengths[C]//2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC), June 23–27, 2019, Munich, Germany. New York: IEEE, 201: 1–1.
CARPENTER L G, BERRY S A, GAWITH C. Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step[J]. Electronics letters, 2017, 53(25): 1672–1674.
PECHEUR V, PORTE H, HAUDEN J, et al. Watt-level SHG in undoped high step-index PPLN ridge wave-guides[J]. OSA continuum, 2021, 4(5): 1404–1414.
SHANTANU P, BIJOY K D, WOLFGANG S. Photorefractive damage resistance in Ti: PPLN waveguides with ridge geometry[J]. Applied physics B, 2015, 120(4): 737–749.
SUNTSOV S, RUTER C E, BRUSKE D, et al. Watt-level 775 nm SHG with 70% conversion efficiency and 97% pump depletion in annealed/reverse proton exchanged diced PPLN ridge waveguides[J]. Optics express, 2021, 29(8): 11386–11393.
Author information
Authors and Affiliations
Corresponding authors
Ethics declarations
Conflicts of interest
The authors declare no conflict of interest.
Additional information
This work has been supported by the Self-deployment Project of Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China (No.2021ZZ104), the Fujian Province STS Project: Design and Key Technology Research of High-Precision Multi-Section (5–10) Lithium Battery Protection Chip (No.2020T3002), and the Fujian Province STS Project: Research on the Preparation and Industrialization Technology of Volume Holographic Grating based on Photorefractive Glass (No.2022T3012).
Rights and permissions
About this article
Cite this article
Cheng, X., Feng, X., Ma, L. et al. Fabrication and characterization of high-damage resistance Zn-diffused MgO: PPLN ridge waveguides. Optoelectron. Lett. 20, 12–17 (2024). https://doi.org/10.1007/s11801-024-3051-3
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11801-024-3051-3