Abstract
A pulse plasma chemical vapor deposition (CVD) technique was developed for improving the growth yield of single-walled carbon nanotubes (SWNTs) with a narrow chirality distribution. The growth yield of the SWNTs could be improved by repetitive short duration pulse plasma CVD, while maintaining the initial narrow chirality distribution. Detailed growth dynamics is discussed based on a systematic investigation by changing the pulse parameters. The growth of SWNTs with a narrow chirality distribution could be controlled by the difference in the nucleation time required using catalysts comprising relatively small or large particles as the key factor. The nucleation can be controlled by adjusting the pulse on/off time ratio and the total processing time.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
Ueda A, Matsuda K, Tayagaki T, Kanemitsu Y. Carrier multiplication in carbon nanotubes studied by femtosecond pump-probe spectroscopy. Applied Physics Letters, 2008, 92(23): 233105
Javey A, Guo J, Wang Q, Lundstrom M, Dai H. Ballistic carbon nanotube field-effect transistors. Nature, 2003, 424(6949): 654–657
Qiu C, Zhang Z, Xiao M, Yang Y, Zhong D, Peng L M. Scaling carbon nanotube complementary transistors to 5-nm gate lengths. Science, 2017, 355(6322): 271–276
He X, Fujimura N, Lloyd J M, Erickson K J, Talin A A, Zhang Q, Gao W, Jiang Q, Kawano Y, Hauge R H, et al. Carbon nanotube terahertz detector. Nano Letters, 2014, 14(7): 3953–3958
Kim H S, Kim W J, Strano M S, Han J H. Optical detection of argon gas flow based on vibration-induced change in photoluminescence of a semiconducting single-walled carbon nanotube bundle. Journal of Nanoscience and Nanotechnology, 2014, 14(12): 9131–9133
Lolli G, Zhang L, Balzano L, Sakulchaicharoen N, Tan Y, Resasco D E. Tailoring (n, m) structure of single-walled carbon nanotubes by modifying reaction conditions and the nature of the support of CoMo catalysts. Journal of Physical Chemistry B, 2006, 110(5): 2108–2115
Loebick C Z, Derrouiche S, Marinkovic N, Wang C, Hennrich F, Kappes M M, Haller G L, Pfefferle L D. Effect of manganese addition to the Co-MCM-41 catalyst in the selective synthesis of single wall carbon nanotubes. Journal of Physical Chemistry C, 2009, 113(52): 21611–21620
Loebick C Z, Derrouiche S, Fang F, Li N, Haller G L, Pfefferle L D. Effect of chromium addition to the Co-MCM-41 catalyst in the synthesis of single wall carbon nanotubes. Applied Catalysis A, General, 2009, 368(1–2): 40–49
Ghorannevis Z, Kato T, Kaneko T, Hatakeyama R. Narrow-chirality distributed single-walled carbon nanotube growth from nonmagnetic catalyst. Journal of the American Chemical Society, 2010, 132(28): 9570–9572
Zhang L, Hou P, Li S, Shi C, Cong H, Liu C, Cheng H. In situ TEM observations on the sulfur-assisted catalytic growth of single-wall carbon nanotubes. Journal of Physical Chemistry Letters, 2014, 5(8): 1427–1432
Li P, Zhang X, Liu J. Aligned single-walled carbon nanotube arrays from rhodium catalysts with unexpected diameter uniformity independent of the catalyst size and growth temperature. Chemistry of Materials, 2016, 28(3): 870–875
He M, Jiang H, Kauppi I, Fedotov P V, Chernov A I, Obraztsova E D, Cavalca F, Wagner J B, Hansen T W, Sainio J, et al. Insights into chirality distributions of single-walled carbon nanotubes grown on different CoxMg1 xO solid solutions. Journal of Materials Chemistry. A, Materials for Energy and Sustainability, 2014, 2(16): 5883–5889
Yang F, Wang X, Zhang D, Yang J, Luo D, Xu Z, Peng F, Li X, Li R, Li Y, et al. Chirality-specific growth of single-walled carbon nanotubes on solid alloy catalysts. Nature, 2014, 510(7506): 522–524
Yang F, Wang X, Si J, Zhao X, Qi K, Jin C, Zhang Z, Li M, Zhang D, Yang J, et al. Water-assisted preparation of high-purity semiconducting (14,4) carbon nanotubes. ACS Nano, 2017, 11(1): 186–193
Yang F, Wang X, Zhang D, Qi K, Yang J, Xu Z, Li M, Zhao X, Bai X, Li Y. Growing zigzag (16,0) carbon nanotubes with structure-defined catalysts. Journal of the American Chemical Society, 2015, 137(27): 8688–8691
Xu B, Kaneko T, Shibuta Y, Kato T. Preferential synthesis of (6,4) single-walled carbon nanotubes by controlling oxidation degree of Co catalyst. Scientific Reports, 2017, 7(11149): 1–9
He M, Fedotov P V, Chernov A, Obraztsova E D, Jiang H, Wei N, Cui H, Sainio J, Zhang W, Jin H, et al. Chiral-selective growth of single-walled carbon nanotubes on Fe-based catalysts using CO as carbon source. Carbon, 2016, 108: 521–528
Rao R, Pierce N, Liptak D, Hooper D, Sargent G, Semiatin S L, Curtarolo S, Harutyunyan A R, Maruyama B. Revealing the impact of catalyst phase transition on carbon nanotube growth by in situ Raman spectroscopy. ACS Nano, 2013, 7(2): 1100–1107
Wang B, Poa C H P, Wei L, Li L, Yang Y, Chen Y. (n, m) Selectivity of single-walled carbon nanotubes by different carbon precursors on Co-Mo catalysts. Journal of the American Chemical Society, 2007, 129(29): 9014–9019
Picher M, Anglaret E, Arenal R, Jourdain V. Processes controlling the diameter distribution of single-walled carbon nanotubes during catalytic chemical vapor deposition. ACS Nano, 2011, 5(3): 2118–2125
Wang J, Liu P, Xia B, Wei H, Wei Y, Wu Y, Liu K, Zhang L, Wang J, Li Q, et al. Observation of charge generation and transfer during CVD growth of carbon nanotubes. Nano Letters, 2016, 16(7): 4102–4109
Kato T, Hatakeyama R. Direct growth of short single-walled carbon nanotubes with narrow-chirality distribution by time-programmed plasma chemical vapor deposition. ACS Nano, 2010, 4(12): 7395–7400
Xu B, Kato T, Murakoshi K, Kaneko T. Effect of ion impact on incubation time of single-walled carbon nanotubes grown by plasma chemical vapor deposition. Plasma and Fusion Research, 2014, 9: 1206075–1–3
Maruyama S, Kojima R, Miyauchi Y, Chiashi S, Kohno M. Low-temperature synthesis of high-purity single-walled carbon nano-tubes from alcohol. Chemical Physics Letters, 2002, 360(3–4): 229–234
Kato T, Jeong G H, Hirata T, Hatakeyama R. Structure control of carbon nanotubes using radio-frequency plasma enhanced chemical vapor deposition. Thin Solid Films, 2004, 457(1): 2–6
Shiau S H, Liu C W, Gau C, Dai B T. Growth of a single-wall carbon nanotube film and its patterning as an n-type field effect transistor device using an integrated circuit compatible process. Nanotechnology, 2008, 19(10): 105303
O’Connell M J, Bachilo S M, Huffman C B, Moore V C, Strano M S, Haroz E H, Rialon K L, Boul P J, Noon W H, Kittrell C, et al. Band gap fluorescence from individual single-walled carbon nanotubes. Science, 2002, 297(5581): 593–596
Weisman R B, Bachilo S M. Dependence of optical transition energies on structure for single-walled carbon nanotubes in aqueous suspension: An empirical Kataura plot. Nano Letters, 2003, 3(9): 1235–1238
Hou B, Wu C, Inoue T, Chiashi S, Xiang R, Maruyama S. Extended alcohol catalytic chemical vapor deposition for efficient growth of single-walled carbon nanotubes thinner than (6,5). Carbon, 2017, 119: 502–510
Ostrikov K, Mehdipour H. Thin single-walled carbon nanotubes with narrow chirality distribution: Constructive interplay of plasma and Gibbs-Thomson effects. ACS Nano, 2011, 5(10): 8372–8382
Lifshitz I, Slyozov V. The kinetics of precipitation from supersaturated solid solutions. Journal of Physics and Chemistry of Solids, 1961, 19(1–2): 35–50
Acknowledgements
This work was supported in part by the Grant-in-Aid for Scientific Research B (Grant No. 16H03892), Grant-in-Aid for Challenging Exploratory Research (Grant No. 16K13707) from JSPS KAKENHI, JST-PRESTO (Grant No. J170002074), and the Cooperative Research Project Program of the Research Institute of Electrical Communication, Tohoku University.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Xu, B., Kaneko, T. & Kato, T. Improvement in growth yield of single-walled carbon nanotubes with narrow chirality distribution by pulse plasma CVD. Front. Chem. Sci. Eng. 13, 485–492 (2019). https://doi.org/10.1007/s11705-019-1831-2
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11705-019-1831-2