Abstract
We demonstrate a full-optical two-channel system for measuring mechanical vibrations of microoscillators, which is based on adaptive holographic interferometer using multiwave mixing in a photorefractive crystal. The orthogonal geometry of dynamic hologram recording makes possible independent operation of the measurement channels. The absolute detection limit of the system to cantilever vibrations in a channel amounted to 2.6·10−6 nm·W1/2 ·Hz−1/2. We tested the system in simultaneous detection of vibrations of two cantilevers with dimensions 215×40×15 μm.
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S. Patil and V. R. Rao, in: A. Tiwari and B. Raj (Eds.), Materials and Failures in MEMS and NEMS, Wiley (2015), p. 325.
A. Arora, A. Arora, V. K. Dwivedi, et al., Sensor Actuat. A: Phys., 141, 256 (2008).
J. Fritz, Analyst, 133, 855 (2008).
P. S. Waggoner and H. G. Craighead, Lab Chip, 7, 1238 (2007).
B. N. Johnson and R. Mutharasan, Biosens. Bioelectron., 32, 1 (2012)
S. Singamaneni, M. C. LeMieux, H. P. Lang, et al., Adv. Mater., 20, 653 (2008).
P. Ahn, X. Chen, Z. Zhang, et al., Sci. Rep., 5 (2015).
O. Basarir, S. Bramhavar, G. Basilio-Sanchez, et al., Opt. Lett., 35, 1792 (2010).
O. Basarir, S. Bramhavar, and K. L. Ekinci, Opt. Exp., 20, 4272 (2012).
A. Sampathkumar, K. L. Ekinci, and T. W. Murray, Nano Lett., 11, 1014 (2011).
K. L. Ekinci, Small, 1, 786 (2005).
R. Mutharasan and B. N. Johnson, U.S. Patent Application, 14/467, 493 (2014).
J. Frejlich, A. A. Kamshilin, V. V. Kulikov, and E. V. Mokrushina, Opt. Commun., 70, 82 (1989).
S. I. Stepanov, Rep. Prog. Phys., 57, 39 (1994).
R. V. Romashko, T. A. Efimov, and Y. N. Kulchin, Quantum Electron., 44, 269 (2014).
R. J. Townsend, N. R. Harris, D.Wenn, et al., Proceedings of the Institution of Mechanical Engineers, J. Mech. Eng. Sci., C 222, 847 (2008).
R. V. Romashko, M. N. Bezruk, A. A. Kamshilin, and Y. N. Kulchin, Quantum Electron., 42, 551. (2012).
R. V. Romashko, M. N. Bezruk, S. A. Ermolaev, and I. N. Zavestovskaya, Bull. Lebedev Phys. Inst., 41, 348 (2014).
A. A. Kamshilin, R. V. Romashko, and Yu. N. Kulchin, J. Appl. Phys., 105, 031101 (2009).
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Romashko, R., Efimov, T. & Kulchin, Y. Full-Optical Two-Channel Adaptive System for Detecting Microcantilever Vibrations. J Russ Laser Res 37, 102–106 (2016). https://doi.org/10.1007/s10946-016-9550-3
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DOI: https://doi.org/10.1007/s10946-016-9550-3