Abstract
An optical inspection system for rapid surface roughness measurement of BiFeO3 (BFO) thin films is developed. It is found that y = −121.45 x + 212.81 is a trend equation for characterizing the surface roughness of BFO thin films. The incident angle of 60◦ is a good candidate for measuring the surface roughness of BFO thin films. The maximum measurement error rate of the optical inspection system developed is less than 2.6%. The savings in inspection time of the surface roughness of BiFeO3 thin films is up to 90%.
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Kuo, CC., Chao, CS. Rapid optical measurement of surface roughness of BiFeO3 films for nonvolatile memory application. J Russ Laser Res 31, 239–244 (2010). https://doi.org/10.1007/s10946-010-9144-4
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DOI: https://doi.org/10.1007/s10946-010-9144-4