Abstract
A model of the electron–hole plasma-driven instability of quasi-Lamb elastic modes in semiconductors with a dioxide cap is developed and applied to the description of laser-induced micropatterning of the semiconductor surface. A good correspondence of the theoretical and experimental results is obtained.
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J. J. Yu, J. Y. Zhang, I. W. Boyd, and Y. F. Lu, Appl. Phys. A, 72, 35 (2001).
V. I. Emel’yanov and A. V. Rogacheva, Quantum Electron., 28, 991 (1998).
V. I. Emel’yanov, Laser Phys., 18, 682 (2008).
I. A. Viktorov, Rayleigh and Lamb Waves: Physical Theory and Applications, Plenum Press, New York (1967).
L. C. Kimerling, Solid State Commun., 21, 1391 (1978).
H. Sumi, Phys. Rev. B, 29, 4616 (1984).
L. D. Landau and E. M. Lifshits, Theory of Elasticity, Pergamon Press, Oxford (1986).
V. I. Emel’yanov, Laser Phys., 18, 1435 (2008).
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Emel’yanov, V.I., Seval’nev, D.M. Plasma-driven instability of quasi-lamb elastic modes as a mechanism of laser-induced micropatterning of a silicon surface with a silicon dioxide cap. J Russ Laser Res 30, 21–33 (2009). https://doi.org/10.1007/s10946-009-9058-1
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DOI: https://doi.org/10.1007/s10946-009-9058-1