Abstract
The construction and technical characteristics of the phase interferometric microscope MIM-2.1 are described. With the help of this modulation interferometric microscope, a vertical resolution up to fractions of a nanometer and a lateral resolution up to tens of nanometers are achieved. The results of measurements obtained on samples of different types, such as a column, a step, a flute, and a fragment of a DVD disk, are presented.
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Andreev, V.A., Indukaev, K.V., Ioselev, O.K. et al. Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements. J Russ Laser Res 26, 394–401 (2005). https://doi.org/10.1007/s10946-005-0042-0
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DOI: https://doi.org/10.1007/s10946-005-0042-0