Abstract
The principle of operation and design of phase interferometric microscopes is studied. A description of the microscope MIM-2.1 constructed according to this principle is presented. A simple model of phase relief reconstruction is developed. Using this model, detection and resolution criteria are formulated for some simple objects such as a column, a step, a groove, and a long bulge.
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Andreev, V.A., Indukaev, K.V. Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. General Principles of Design and Operation. J Russ Laser Res 26, 380–393 (2005). https://doi.org/10.1007/s10946-005-0041-1
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DOI: https://doi.org/10.1007/s10946-005-0041-1