Abstract.
This paper reports the two-dimensional mapping of atomic hydrogen concentration with two-photon excited laser induced fluorescence in a multi-wire grid hot-filament chemical vapor deposition reactor. The measurements were made in a diamond film deposition environment under different filament temperatures and wire configurations. The measurement was calibrated with a titration reaction using NO2 as a titrant. The kinetic gas temperature in the reactor was measured from the Doppler broadening of the Lyman-β transition excited in the fluorescence. The filament temperature was found to have a significant effect on atomic hydrogen production and transfer to the substrate. The axial concentration distributions were compared to a one-dimensional kinetic gas–surface chemistry model with good agreement. The model produced a reasonable estimate for the bulk diamond film growth rate.
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Received: 25 June 2001 / Revised version: 15 February 2002 / Published online: 2 May 2002
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Larjo, J., Koivikko, H., Lahtonen, K. et al. Two-dimensional atomic hydrogen concentration maps in hot-filament diamond-deposition environment. Appl Phys B 74, 583–587 (2002). https://doi.org/10.1007/s003400200855
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DOI: https://doi.org/10.1007/s003400200855