Abstract.
We report on the fabrication process of a scanning force microscopy (SFM) cantilever probe suitable for the investigation of ultrafast transient signals in microwave integrated circuits. High temporal resolution is achieved by integrating a laser-gated photoconductive switch within a coplanar waveguide structure onto a low-temperature GaAs cantilever. This is demonstrated by temporal and spatio-temporal measurements performed on a coplanar strip line.
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Received: 17 February 1999 / Revised version: 22 April 1999 / Published online: 29 July 1999
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Steffens, W., Heisig, S., Keil, U. et al. Spatio-temporal imaging of voltage pulses with a laser-gated photoconductive sampling probe. Appl Phys B 69, 455–458 (1999). https://doi.org/10.1007/s003400050834
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DOI: https://doi.org/10.1007/s003400050834