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Received: 15 May 1998 / Revised version: 5 August 1998 / Published online: 24 February 1999
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Haruta, K., Saito, Y., Inoue, M. et al. High-efficiency 2 kW XeCl excimer laser . Appl Phys B 68, 663–669 (1999). https://doi.org/10.1007/s003400050683
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DOI: https://doi.org/10.1007/s003400050683