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, O2 and N2 in a discharge-excited ArF-excimer laser. Measured characteristics include laser pulse energy, small-signal gain, and laser spectrum. Measurement results indicate that laser pulse energy degradation for such impurities (<100 ppm) is mainly due to optical absorption. It has also been found that for O2 contaminants laser pulse energy degradation is strongly dependent on operational repetition rates; at higher repetition rates, an increased concentration of O2 impurities results in a reduced small-signal gain and a consequent decline in laser pulse energy.
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Received: 12 June 1997/Revised version: 3 December 1997
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Saito, T., Ito, S. Gas contaminant effect in a discharge-excited ArF excimer laser . Appl Phys B 66, 579–583 (1998). https://doi.org/10.1007/s003400050438
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DOI: https://doi.org/10.1007/s003400050438