Abstract
In this letter, we report on single-mode operation of originally multi-mode oxide VCSEL by using etched photonic crystal air holes and unique trench structure. The device fabrication utilized conventional photolithography; with simplified lithography step of self-aligning the photonic crystal and trench structures to the laser aperture for efficient and vigorous device processing. The fabricated photonic crystal VCSEL with trench device exhibits a single-mode output power of 0.7 mW, threshold current of 3.5 mA, slope efficiency of 0.10 W/A, and continuous single-mode output spectra at wide operating current range. The results are compared with conventional multi-mode oxide VCSEL of similar device geometry. In addition, theoretical analysis is presented for developing further understanding of the photonic crystal VCSEL.
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Alias, M.S., Shaari, S., Leisher, P.O. et al. Highly confined and continuous single-mode operation of self-align photonic crystal oxide VCSEL. Appl. Phys. B 100, 453–459 (2010). https://doi.org/10.1007/s00340-010-4062-2
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DOI: https://doi.org/10.1007/s00340-010-4062-2