Abstract
It was found that the electron density scale length of Sn plasma irradiated with a long duration CO2 laser pulse is much shorter than that predicted by the classical isothermal model. The experimentally observed small dominant region of in-band (2% bandwidth) 13.5-nm extreme ultraviolet (EUV) emission coincides with this constrained hydrodynamic behavior. The lower hydrodynamic efficiency may come from the strongly inhibited ablation mass and makes a CO2-laser-produced Sn plasma suitable as an EUV radiation source.
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Open Access This is an open access article distributed under the terms of the Creative Commons Attribution Noncommercial License (https://creativecommons.org/licenses/by-nc/2.0), which permits any noncommercial use, distribution, and reproduction in any medium, provided the original author(s) and source are credited.
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Tao, Y., Tillack, M.S., Yuseph, S. et al. Nonclassical hydrodynamic behavior of Sn plasma irradiated with a long duration CO2 laser pulse. Appl. Phys. B 99, 397–400 (2010). https://doi.org/10.1007/s00340-010-3992-z
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DOI: https://doi.org/10.1007/s00340-010-3992-z