Abstract
Using the TDLS method it has been found that ammonia (NH3) is the main impurity in arsine (AsH3) and phosphine (PH3), produced by hydrolysis of magnesium arsinide and phosphinide, respectively. NH3 behavior is abnormal in solutions of these hydrides: NH3 reveals the properties of a more volatile impurity in relation to arsine and phosphine, although its boiling temperature is higher than that of AsH3 and PH3. The observable anomaly is connected with the fact that in solutions of arsine and phosphine NH3 shows properties differing from the properties of pure ammonia. It was supposed that the influence of intermolecular interaction between ammonia molecules, when diluted by arsine or phosphine, decreases. During the purification of arsine or phosphine one must continuously monitor the NH3.concentration in the extraction of the light fraction in order to define the point at which to terminate the purification process.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
J.V. DiLorenzo, D.D. Khandelwal (eds.), GaAs FET Principles and Technology (Artech House, Norwood, 1982)
G.G. Devyatykh, A.D. Zorin, High-Purity Volatile Inorganic Hydrides (Nauka, Moscow, 1974) (in Russian)
A.F. Zhigach, D.S. Stasinevich, Hydrides Chemistry (Chimia, Leningrad, 1976) (in Russian)
N.T. Ivanova, N.A. Vislykh, V.V. Voevodina, High-Purity Subst. 5, 198 (1990) (in Russian)
S. Monroe, J. IEST 41(1), 21 (1998)
A.G. Berezin, A.I. Nadezhdinskii, Ya.Ya. Ponurovskii, D.B. Stavrovskii, I. Vyazov, A.P. Kotkov, V.A. Ivanov, N.D. Grishnova, A.V. Shirayev, V.A. Sidorov, D.A. Kotkov, Appl. Phys. B 90, 317 (2008)
A. Berezin, O. Ershov, A. Nadezhdinskii, Appl. Phys. B 75, 203 (2002)
L.S. Rothman, I.E. Gordon, A. Barbe, D. Chris Benner, P.F. Bernath, M. Birk, V. Boudon, L.R. Brown, A. Campargue, J.-P. Champion, K. Chance, L.H. Coudert, V. Dana, V.M. Devi, S. Fally, J.-M. Flaud, R.R. Gamache, A. Goldman, D. Jacquemart, I. Kleiner, N. Lacome, W.J. Lafferty, J.-Y. Mandin, S.T. Massie, S.N. Mikhailenko, C.E. Miller, N. Moazzen-Ahmadi, O.V. Naumenko, A.V. Nikitin, J. Orphal, V.I. Perevalov, A. Perrin, A. Predoi-Cross, C.P. Rinsland, M. Rotger, M. Simeckova, M.A.H. Smith, K. Sung, S.A. Tashkun, J. Tennyson, R.A. Toth, A.C. Vandaele, J. Vander Auwera, J. Quant. Spectrosc. Radiat. Transf. 110, 533 (2009)
S. Schilt, in Abstracts of 7th Int. Conf. on TDLS, Zermatt, July 2009, p. 12
H.L. Glinka, General Chemistry (Chimia, Leningrad, 1988) (in Russian)
P. Perrot, A to Z of Thermodynamics (Oxford University Press, Oxford, 1998). ISBN:0198565569
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kotkov, A.P., Ivanov, V.A., Grishnova, N.D. et al. Results of TDLS application for ammonia monitoring in a process of high-purity arsine and phosphine production. Appl. Phys. B 100, 391–396 (2010). https://doi.org/10.1007/s00340-009-3895-z
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00340-009-3895-z