Abstract
We have developed single-mode vertical-cavity surface-emitting laser (VCSELs) with a mode selective aperture (MSA) in the DBR mirror that exhibits a high-order transverse-mode filtering effect. The VCSELs with an MSA were fabricated using standard intracavity-contacted VCSEL processes without any additional steps resulting from the simultaneous formation of the MSA and current aperture via a single-step oxidation. The VCSELs fabricated with a current aperture and MSA diameter of 5 and 7 μm, respectively, exhibited a stable single-mode operation with a side mode suppression ratio of over 35 dB and a divergence angle below 10° for the entire drive current range.
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42.55.Px; 85.35.Be
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Chang, K., Song, Y. & Lee, Y. Stable single-mode operation of VCSELs with a mode selective aperture. Appl. Phys. B 89, 231–234 (2007). https://doi.org/10.1007/s00340-007-2778-4
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DOI: https://doi.org/10.1007/s00340-007-2778-4