Abstract
A micrometer-size solid immersion lens (μ-SIL) of glass with a super-spherical shape is obtained using a simple preparation procedure. Soda-lime–silica glass particles are melted on a glassy-carbon substrate with a surface of optical grade and cooled to room temperature. The obtained glass particles are transparent and have a super-spherical shape. Their shapes are found to satisfy the conditions of the SIL function for evanescent-field optics. Fine uneven surface textures of an integrated circuit with the depth of about 20 nm are clearly recognized using the prepared μ-SIL, and 1.8 times higher horizontal resolution than without the μ-SILis also attained. It was ensured that the glass μ-SILworks as the evanescent-field optics to visualize the nanometer-scale structure.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
S. Kawata, M. Ohtsu, M. Irie (eds.), Nano-Optics (Springer Ser. Opt. Sci. 84) (Springer, Berlin, 2002)
S.M. Mansfield, G.S. Kino, Appl. Phys. Lett. 57, 2615 (1990)
M. Yoshita, K. Koyama, Y. Hayamizu, M. Baba, H. Akiyama, Jpn. J. Appl. Phys. 41, L858 (2000)
K.B. Crozier, D.A. Fletcher, G.S. Kino, C.F. Quate, J. Microelectromech. Syst. 11, 470 (2002)
B.D. Terris, H.J. Mamin, D. Rugar, W.R. Studemund, G.S. Kino, Appl. Phys. Lett. 65, 388 (1994)
T. Sasaki, M. Baba, M. Yoshita, H. Akiyam, Jpn. J. Appl. Phys. 36, L962 (1997)
K. Koyama, M. Yoshita, M. Baba, T. Suemoto, H. Akiyama, Appl. Phys. Lett. 75, 1667 (1999)
T. Young, Miscellaneous Works, Vol. 1, ed. by G. Peacock (Murray, London, 1855), p. 418
A. Dupre, Theorie Mecanique de la Chaleur (Gauthier-Villars, Paris, 1869)
R.N. Wenzel, Ind. Eng. Chem. 28, 988 (1936)
Author information
Authors and Affiliations
Corresponding author
Additional information
PACS
42.70.Ce; 42.79.Bh; 68.03.Cd; 68.08.Bc; 68.37.Uv
Rights and permissions
About this article
Cite this article
Yano, T., Shibata, S. & Kishi, T. Fabrication of micrometer-size glass solid immersion lens. Appl. Phys. B 83, 167–170 (2006). https://doi.org/10.1007/s00340-006-2178-1
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00340-006-2178-1