Abstract
We have developed a three-dimensional microfabrication method using thermo-sensitive resin. This method exploits the fact that polymerization of thermo-sensitive resins does not obey the law of linear superposition. Three-dimensional (3D) objects are created inside the thermo-sensitive resin by 3D scanning of the volume with a focused laser. Fabrication with the focus of the laser inside the resin can achieve good accuracy and high resolution of the structure. A fabrication system, which consisted of a CD-R pick-up laser and an XYZ stage, was built. Nonlinear polymerizations of the thermo-sensitive resin were verified by fabrication in various conditions of laser intensity and exposure time. In order to demonstrate the present method, a simple 3D microstructure was fabricated inside the resin.
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References
K. Ikuta, K. Hirowatari: in Proc. IEEE Int. Workshop Micro Electro Mechanical Systems, 1994, p. 1
S. Shoji, N. Smith, S. Kawata: Proc. SPIE 3740, 541 (1999)
T. Hayashi: Micro Machines & Materials (CMC, Japan 1999)
H. Ukita: Optomechatronics (Morikita Shuppan, Japan 2001) pp. 60–124
S. Maruo, S. Kawata: in Proc. IEEE Int. Workshop Micro Electro Mechanical Systems, 1997, pp. 169–174
H.-B. Sun, T. Tanaka, S. Kawata: Appl. Phys. Lett. 80, 3673 (2002)
S. Kawata, H.-B. Sun, T. Tanaka, K. Takada: Nature 412, 697 (2001)
K. Ikuta, S. Maruo, S. Kojima: in Proc. IEEE Int. Workshop Micro Electro Mechanical Systems, 1998, pp. 290–295
S. Maruo, K. Ikuta: Appl. Phys. Lett. 79, 2656 (2000)
C.A. Mack: Inside PROLITH, A Comprehensive Guide to Optical Lithography Simulation (FINLE Technologies, USA 1997) pp. 67–74
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42.62.Cf; 42.70.Jk; 42.82.Cr
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Yamakawa, S., Amaya, K., Gelbart, D. et al. Development of three-dimensional microfabrication method using thermo-sensitive resin. Appl. Phys. B 79, 507–511 (2004). https://doi.org/10.1007/s00340-004-1597-0
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DOI: https://doi.org/10.1007/s00340-004-1597-0