Abstract.
. Investigations of the efficient generation of powerful coherent radiation at 82.8 nm by frequency tripling of short-pulse KrF laser radiation are presented. Argon gas is selected as nonlinear medium due to the resonantly enhanced 3rd-order susceptibility χ(3)(-3ω,ω,ω,ω). Pulse energies of 100 μJ at 82.8 nm have been measured for a pump pulse energy of 14 mJ. An upscaling to more than 500 μJ is expected with available more powerful pump lasers. Features of this XUV source and possible applications are discussed.
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Received: 26 July 2002 / Published online: 15 November 2002
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Dölle, C., Reinhardt, C., Simon, P. et al. Generation of 100 μJ pulses at 82.8 nm by frequency tripling of sub-picosecond KrF laser radiation . Appl Phys B 75, 629–634 (2002). https://doi.org/10.1007/s00340-002-1023-4
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DOI: https://doi.org/10.1007/s00340-002-1023-4