Abstract.
An on-chip capillary system with potential applications in miniaturized analytical chemistry and spectroscopy setups has been microfabricated using photolithographic, etching, and aligned bonding techniques. The optical waveguiding properties of the capillary are investigated theoretically and experimentally. Chip insertion losses as low as 3 dB at 0.514 μm wavelength have been measured for a 15-mm-long water-filled capillary waveguide with 63 μm internal diameter.
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Received: 8 November 1999 / Revised version: 13 January 2000 / Published online: 24 March 2000
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Grewe, M., Grosse, A. & Fouckhardt, H. Theoretical and experimental investigations of the optical waveguiding properties of on-chip microfabricated capillaries . Appl Phys B 70, 839–847 (2000). https://doi.org/10.1007/PL00021143
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DOI: https://doi.org/10.1007/PL00021143