Abstract
The mass spectrometric study of the evaporation of As and P, respectively, during contacting of GaAs and GaP diodes was reported at the 7th International Vacuum Congress (Vienna 1977). Now new results obtained on various contact-crystal systems are presented.
A laboratory SIMS systems was built using a Riber QML 51 quadrupole mass spectrometer. The study of contacting processes was followed by SIMS in depth profiling of the contact-GaAs layer structures. Some SIMS studies of SiO2 layers prepared by various methods are described.
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T. Sebestyén, M. Menyhard andD. Szigethy, Electronics Lett.,12, 96, 1974.
D. Szigethy, T. Sebestyén, I. Mojzes andG. Gergely in Proc. 7th International Vacuum Congress and 3rd International Conf. Solid Surfaces, Vienna, 1977, Vol. II, p. 1959.
E. Kinsbron, P. K. Gallagher andA. T. English, Solid-State Electronics,22, 517, 1979.
I. Mojzes, phys. stat. sol. (a),47, K183, 1978.
I. Mojzes, Acta Phys. Hung.,48, 131, 1980.
I. Mojzes, T. Sebestyen, P. B. Barna, G. Gergely andD. Szigethy, Thin Solid Films,61, 27, 1979.
M. Riedel andB. Perović, Boris Kidrič Inst. Nucl. Phys. Beograd, IBK 1349, 1975.
K. Varga-Josepovits andP. Pavlyák: A szilárdtestkutatás újabb eredményei (Recent results in solid state research, in Hungarian). Ed.: G. Gergely, Akadémiai Kiadó, Budapest,5, 175, 1979.
D. Szigethy andM. Riedel, Proc. XXII. Hung. Conf. Spectral Analysis, Salgótarján, June 1979, 191, 1979.
J. Maul andK. Wittmack, Surface Sci.,47, 358, 1975.
I. Bársony, D. Marton andJ. Giber, Thin Solid Films,51, 275, 1978.
Á. Barna, M. Németh-Sallay, I. C. Szép, P. I. Didenko, V. G. Litovchenko, P. I. Marchenko andG. F. Romanova, Thin Solid Films,55, 355, 1978.
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Szigethy, D., Gergely, G., Mojzes, I. et al. Mass spectrometric study of semiconductor layer structures. Acta Physica 49, 199–205 (1980). https://doi.org/10.1007/BF03158743
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DOI: https://doi.org/10.1007/BF03158743