Abstract
The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.
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Choi, I., Kim, Y., Kang, S.K. et al. Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and Langmuir-Blodgett films. Korean J. Chem. Eng. 22, 635–638 (2005). https://doi.org/10.1007/BF02706656
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DOI: https://doi.org/10.1007/BF02706656