Abstract
Highly ordered pore array in anodic aluminum oxide was fabricated by anodizing pure aluminum. The order of a pore array was affected by anodizing voltage, electrolyte temperature, and first anodizing time. A regular pore array with mean diameter of 24 nm and interpore distance of 109 nm could be formed by two-step anodization at 40 V., oxalic acid concentration of 0.3 M and electrolyte temperature of 15 ‡C. The measured interpore distance showed linearity with anodizing voltage. The diameter of pores was adjusted by pore widening treatment in a 5 wt% phosphoric acid solution at 30 ‡C after two step anodization. The mechanism of self-arrangement of pores could be explained by the repulsive interaction between the pore walls.
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Abbreviations
- l p :
-
pore length [nm]
- ta :
-
anodizing time [min]
- Va :
-
anodizing voltage [V]
- R:
-
growth rate [nm/min]
- Di :
-
interpore distance [nm]
- Dp :
-
pore diameter [nm]
- tw :
-
pore widening time [min]
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Hwang, SK., Jeong, SH., Hwang, HY. et al. Fabrication of highly ordered pore array in anodic aluminum oxide. Korean J. Chem. Eng. 19, 467–473 (2002). https://doi.org/10.1007/BF02697158
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DOI: https://doi.org/10.1007/BF02697158