Abstract
Superconducting Bi(Pb)-Sr-Ca-Cu-O thin films were successfully fabricated on MgO substrates by dc sputtering and rapid thermal annealing. No furnace annealing was used in the process. The superconducting thin films, deposited by dc sputtering for 8 hr and rapid thermally annealed at 845°C for 60 sec, showed a superconducting transition onset temperature of 110 K and a zero resistance transition temperature of 86 K. Highly oriented films with the c-axis normal to the substrate surface were obtained. To our knowledge, this is the first time that Bi(Pb)-Sr-Ca-Cu-O superconducting thin films have been fabricated using rapid thermal annealing.
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Yu, CF., Lee, J.YM., Lin, IN. et al. Fabrication of Bi(Pb)-Sr-Ca-Cu-O superconducting Thin films by rapid thermal annealing. J. Electron. Mater. 21, 955–958 (1992). https://doi.org/10.1007/BF02684202
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DOI: https://doi.org/10.1007/BF02684202