Abstract
Using a low-energy neutron beam as an isotopic probe, neutron depth profiling (NDP) provides quantitative depth profiles in nearly all solid matrix materials. Several of the light elements, such as He, Li, B, and N can be nondestructively analyzed by NDP. The information obtained using NDP is difficult if not impossible to determine by non-nuclear techniques. As a result, NDP is used collaboratively with techniques such as SIMS, RBS, FTIR, PGAA, and AES. Profiles measured by NDP are given for semiconductor and optical processing materials, and light weight alloys. Improvements in the technique are discussed with emphasis on the use of intense cold neutron beams.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
M. GREENBLATT, L. HENRY, Private Communication.
J. F. ZIEGLER, G. W. COLE, J. E. E. CAGLIN, J. Appl. Phys. 43 (1972) 3809.
R. G. DOWNING, J. T. MAKI, R. F. FLEMING, in Microelectronics Processing: Inorganic Materials Characterization L. A. CASPER, (Ed.) ACS Symp. Ser., No. 295 (1986) 163.
J. P. BIERSACK, D. FINK, in S. DATZ, B. R. APPLETON, C. D. MOAK (Eds), Atomic Collisions in Solids, Plenum Press, New York, 1975, p. 737.
D. FINK, J. P. BIERSACK, H. LIEBL, in H. RYSSEL, H. GLAWISCHNIG (Eds), Ion Implantation: Equipment and Techniques, Springer-Verlag, Berlin, 1983, p. 318.
J. P. BIERSACK, D. FINK, R. HENKELMANN, K. MULLER, Nucl. Instr. Methods, 149 (1978) 93.
R. G. DOWNING, R. F. FLEMING, J. K. LANGLAND, D. H. VINCENT, Nucl. Instr. Methods Phys. Res., 218 (1983) 47.
J. F. ZIEGLER, The Stopping Power and Ranges of Ions in Matter, Pergamon Press Inc., New York, 1977.
A. H. WAPSTRA, G. AUDI, Nuclear Phys. A432 (1985) 1.
P. M. ZEITZOLF, T. HOSSAIN, D. BOISVERT, R. G. DOWNING, to be published
J. R. EHRSTEIN, R. G. DOWNING, B. R. STALLARD, D. S. SIMONS, R. F. FLEMING, in D. GUPTA (Ed.), 3rd Symp. or Semiconductor Processing, ASTM STP 850, American Society for Testing and Materials, Baltimore, 1984, p. 409.
W. VANDERVORST, F. R. SHEPHERD, R. G. DOWNING, J. Vacuum Sci. Technol. A3 (1985) 1318.
P. J. McMARR, J. R. BLANCO, K. VEDAM, L. J. PILIONE, to be published.
J. COBURN, J. Vacuum Sci. Technol., 13 (1976).
D. W. OBLAS, R. G. DOWNING, to be published.
A. MILLER, R. E. RICKER, J. T. MAKI, R. G. DOWNING, to be published.
J. T. MAKI, R. F. FLEMING, D. H. VINCENT, Nucl. Instr. Methods, in press.
H. RYSSEL, K. MULLER, J. P. BIERSACK, W. KRUGER, G. LANG, F. JAHNEL, Phys. Status Solidi, 57 (1980) 619.
L. K. VODOPYANOV, S. P. KOZYREV, Phys. Status Solidi, 72 (1982) K133.
R. C. BOWMAN, Jr., R. G. DOWNING, R. E. ROBERTSON, J. F. KNUDSEN, to be published.
J. E. RILEY, J. W. MITCHELL, R. G. DOWNING, R. F. FLEMING, R. M. LINDSTROM, D. H. VINCENT, Mater. Sci. Forum, 2 (1984) 123.
Z. NAGY, B. VASVARI, P. DUWEZ, L. BAKOS, J. BOGANCS, V. M. NAZAROV, Phys. Status Solidi (a), 61 (1980) 689.
J. P. BIERSACK, D. FINK, J. Nucl. Mater., 53 (1974) 328.
J. P. BIERSACK, D. FINK, P. MERTENS, R. A. HENKELMANN, K. MULLER (Ed.), in Plasma Wall Interactions, Pergamon Press, Oxford, 1976, p. 421.
J. P. BIERSACK, D. FINK, R. A. HENKELMANN, K. MULLER, J. Nucl. Mater., 85–86 (1979) 1165.
D. FINK, J. P. BIERSACK, F. JAHNEL, R. HENKELMANN, in Analysis of Non-Metals in Metals, Walter de Gruyter and Co., Berlin 1981.
D. FINK, J. P. BIERSACK, M. STADELE, K. TJAN, V. CHENG, Nucl. Instr. Methods Phys. Res., 218 (1983) 171.
D. FINK, J. P. BIERSACK, M. STADELE, K. TJAN, R. A. HARING, R. A. De VRIES, Nucl. Instr. Methods Phys. Res., B1 (1984) 275.
D. FINK, J. P. BIERSACK, K. TJAN, V. K. CHENG, Nucl. Instr. Methods, 194 (1982) 105.
H. GEISSEL, W. N. LENNARD, T. K. ALEXANDER, G. C. BALL, J. S. FORSTER, M. A. LONE, L. MILANI, D. PHILLIPS, H. H. PLATTNER, Nucl. Instr. Methods, B2 (1984) 770.
W. N. LENNARD, H. GEISSEL, T. K. ALEXANDER, R. HILL, D. P. JACKSON, M. A. LONE, and D. PHILLIPS, Nucl. Instr. Methods, B10/11 (1985) 592.
K. MULLER, R. HENKELMAN, J. P. BIERSACK, and P. MERTENS, J. Radioanal. Chem., 38 (1977) 9.
D. J. MYERS, W. G. HALSEY, J. S. KING, D. H. VINCENT, Radiat. Effects, 51 (1980) 251.
D. J. MYERS, University of Michigan-Ann Arbor, Masters Thesis, 1979.
W. G. HALSEY, University of Michigan-Ann Arbor, Ph. D. dissertation, 1980.
R. G. DOWNING, R. F. FLEMING, D. S. SIMONS, D. E. NEWBURY, in K. F. J. HEINRICH (Ed.), Microbeam Analysis, San Francisco Press, San Francisco, 1982, p. 219.
J. P. BIERSACK, D. FINK, J. LAUCH, R. HENKELMANN, K. MULLER, Nucl. Instr. Methods, 188 (1981) 411.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Downing, R.G., Maki, J.T. & Fleming, R.F. Analytical applications of neutron depth profiling. Journal of Radioanalytical and Nuclear Chemistry, Articles 112, 33–46 (1987). https://doi.org/10.1007/BF02037274
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02037274