Abstract
An experimental investigation to improve the lifetime of a discharge-excited ArF-excimer laser is presented. The three dominant factors restricting its lifetime are CF4 generation in the laser gas, color-center formation in the optics and input power density reduction due to electrode ablation. Copper electrodes were superior to nickel electrodes in regard to electrode ablation. A gas lifetime of more than 109 shots (about one month at 400 Hz) is shown for an ArF-excimer laser with a liquid-nitrogen trap and high-temperature zirconium alloy trap.
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J. Reid, G. Bishop, S. Hastie, B. Norris, R. Weeks, E. Williams, T. Znotins: Proc. Photo-Opt. Instrum. Eng.1041, 186 (1989)
M.C. Gower, A.J. Kearsley, C.E. Webb: IEEE J. QE-16, 231 (1980)
G.M. Jurish, W.A. Von Drasek, R.K. Brimacombe, J. Reid: Appl. Opt.31, 1975 (1992)
M. Arai, S. Ito, and K. Hotta: Tech. Dig. CLEO '91, May (1991) Paper CTha4
J. Fujimoto, T. Ishihara, M. Mizoguchi: In Tech. Dig. CLEO '92, May (1992) Paper CTud7
T. Saito, S. Ito, A. Tada, K. Hotta: Tech. Dig CLEO '93, May (1993) Paper CWJ13
R. Tennant, N. Peterson: Doc. LA-UR-82-2268 (Los Alamos National Laboratory, NM 1982)
R.T. Williams: SPIE Proc.541, 25 (1985)
I. Toepke, D. Cope: SPIE Proc.1835, 89 (1992)
R.F. Blunt, M.I. Cohen: Phys. Rev.153, 1031 (1967)
T.Y. Chang: Rev. Sci. Instrum.44, 405 (1973)
R.V. Arutyunyan, V. Yu. Baranov, V.M. Borisov, A.Yu. Vinokhodov, Yu.B. Kiryukihin: Sov. J. Quantum Electron.15, 639 (1985)
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Saito, T., Ito, S. & Tada, A. Long lifetime operation of an ArF-excimer laser. Appl. Phys. B 63, 229–235 (1996). https://doi.org/10.1007/BF01833791
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DOI: https://doi.org/10.1007/BF01833791