Abstract
The paper gives an overview of the problems of Standardless analysis of bulk specimens by energy dispersive spectrometry (EDS) in scanning electron microscopes (SEM). The interest is concentrated on the present (and future) developments. The influence of the fluorescence excited by the continuum is discussed. Some improvements are proposed for the ionization cross-section. The difficulties due to the Coster-Kronig radiationless transitions are mentioned for the L lines. Emphasis is put on the necessity of an accurate modelling of the detector window, in order to be able to calculate reliably the efficiency of detection, mainly for the ultra-light elements. It is shown that some hypotheses such as the continuity of the fluorescence yield with the atomic number, which are currently accepted for heavier elements, could be wrong in the field of ultra-light elements. The capability of Standardless analysis in special situations is discussed: analysis at oblique electron beam incidence, analysis of specimens with a thin conductive coating, analysis of stratified specimens.
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Pouchou, JL. Standardless X-ray analysis of bulk specimens. Mikrochim Acta 114, 33–52 (1994). https://doi.org/10.1007/BF01244532
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DOI: https://doi.org/10.1007/BF01244532