Abstract
A wide aperture X-ray preionized discharge-pumped KrF excimer laser has been constructed. A flat plate pulse-forming line (36 nF, 340 kV) charges a peaking capacitor (6 nF) through a rail-gap to facilitate a rapid discharge in the laser head. Collimated X-ray preionization is employed to obtain a wide and uniform discharge. The laser is intended to be used as a short pulse amplifier and results are presented when characterized as an oscillator. The active cross-section of the laser beam is 10×8 cm2 with 50 cm effective electrode length. The laser pulse energy exceeds 4.7 J in a 28 ns pulse (FWHM).
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A. Endoh, M. Watanabe, N. Sarukura, S. Watanabe: Opt. Lett.14, 353 (1989)
A.J. Taylor, C.R. Tallman, J.P. Roberts, C.S. Lester, T.R. Gosnell, P.H.Y. Lee, G.A. Kyrala: Opt. Lett.15, 39 (1990)
S. Szatmári, F.P. Schäfer: J. Opt. Soc. Am. B4, 12 (1987)
T.S. Luk, A. McPherson, G. Gibson, K. Boyer, C.K. Rhodes: Opt. Lett.14, 1113 (1989)
L.F. Champagne, A.J. Dudas, N.W. Harris: J. Appl. Phys.62, 1576 (1987)
S. Watanabe, A. Endoh: Appl. Phys. Lett.41, 799 (1982)
B. Rácz, M. Steyer, H. Mizoguchi: Opt. Quantum Electron. (submitted)
W.J. Sarjeant, A.J. Alcock, K.E. Leopold: IEEE J. QE-14, 177 (1978)
R.S. Taylor, K.E. Leopold: Proc. 15th Power Modulator Symp., Baltimore, MD (1982) p. 113
R.S. Taylor, P.B. Corkum, S. Watanabe, K.E. Leopold, A.J. Alcock: IEEE J. QE-19, 416 (1983)
M. Steyer, B. Ouyang, K.A. Stankov, G. Szabó, H. Mizoguchi, F.P. Schäfer: Proc. SPIE1023, 75 (1989)
A. Endoh, S. Watanabe, M. Watanabe: J. Appl. Phys.55, 1322 (1984)
R.S. Taylor, K.E. Leopold: Rev. Sci. Instrum.55, 52 (1984)
M. Steyer: J. Phys. D23, 18 (1990)
W.J. Sarjeant, A.J. Alcock: Rev. Sci. Instrum.47, 1283 (1976)
B.L. Weyler, L.F. Champagne: SPIE Vol.709, 3 (1986)
M. Steyer, K.A. Stankov, H. Mizoguchi, B. Ouyang, F.P. Schäfer: Appl. Phys. B49, 331 (1989)