Abstract
Excimer-laser ablation of polyimide films into He and N2 atmospheres in the pressure range of 5×10−5–10−2 atm is reported. Using 193 nm radiation at 1 J/cm2, it was found that the etch depth per pulse decreases by a factor of 2 with increasing ambient pressure. A description of the ablation process is presented in terms of a strong point explosion model with an outgoing shock wave which produces ingoing drag forces in the gas near the film. These drag a fraction of the ablated fragments and partially redeposit them onto the sample, thus reducing the observed etch depth per pulse.
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R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett.41, 576 (1982)
J.E. Andrew, P.E. Dyer, D. Forster, P.H. Key: Appl. Phys. Lett.43, 717 (1983)
G. Koren, J.T.C. Yeh: Appl. Phys. Lett.44, 1112 (1984); J. Appl. Phys.56, 2120 (1984)
G. Koren: Appl. Phys. Lett.45, 10 (1984)
J.H. Branon, J.R. Lankard, A.I. Baise, F. Burns, J. Kaufman: J. Appl. Phys.58, 2036 (1985)
G.M. Davis, M.C. Gower, C. Fotakis, T. Efthimiopoulos, P. Argyrakis: Appl. Phys. A36, 27 (1985)
R.J. Lane, J.J. Wyne, R.G. Geronemus: Private communication
P.E. Dyer, R. Srinivasan: Appl. Phys. Lett.48, 445 (1986)
Ya.B. Zeldovich, Yu.P. Raizer:Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena, ed. by W.D. Hayes and R.F. Probstein (Academic, New York 1966) Vol. I, pp. 93–101
G. Koren, F. Ho, J.J. Ritsko: Appl. Phys. Lett.46, 1006 (1985); Appl. Phys. A40, 13 (1986)
H. Brode: J. Appl. Phys.26, 766 (1955)
S. Glasstone:The Effects of Nuclear Weapons, U.S. Atomic Energy Commission (Washington DC 1962) pp. 102–109