Abstract
Improvements in output pulse energy and efficiency of a conventional capacitor-transfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 J for XeCl, KrF, and ArF lasers in square beams of about 2×2 cm2, and the maximum overall efficiency observed is 2.9% for XeCl, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond (∼ 32 ps) XeCl laser amplification system, and was operated as an amplifier at a repetitive frequency of 10 Hz. Saturation fluence for XeCl laser was measured to be 1.4 mJ/cm2, and the picosecond pulse energy of ∼40 mJ was extracted from the amplifier.
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On leave from Ebara Corp., 6-6-7, Ginza, Chuo-ku, Tokyo 104, Japan
On leave from Mitsubishi Heavy Industries, LTD., 4-6-22, Kan-on shinmachi, Nishi-ku, Hiroshima 733, Japan
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Miyazaki, K., Fukatsu, T., Yamashita, I. et al. Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser. Appl. Phys. B 52, 1–7 (1991). https://doi.org/10.1007/BF00405678
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DOI: https://doi.org/10.1007/BF00405678