Abstract
We report the application of a soft X-ray CCD for X-ray laser experiments. A newly developed CCD which has a thinned protection layer (SiO2) of about 0.2 μm was attached to a grazing incidence spectrometer with a resolving power of 16000 in order to measure high-resolution spectra of a germanium soft X-ray laser. Clear spectra have been recorded with a high sensitivity in the energy range between 51 eV (240 Å) and 55 eV (225 Å). In addition to the two strong lasing lines at 236 Å and 232 Å, more than 20 weak spontaneous emission lines have been recorded in this energy range. The spectral width of the 236 Å lasing line is approximately 20.5 mÅ at the full width at half maximum. It is shown that this direct X-ray detection system has a spatial resolution of about 1/10 of the CCD pixel size in this spectral measurement.
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Tsunemi, H., Nomoto, S., Hayashida, K. et al. Application of a newly developed CCD for spectral-width measurements of a 53 eV germanium laser. Appl. Phys. B 57, 331–336 (1993). https://doi.org/10.1007/BF00332458
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DOI: https://doi.org/10.1007/BF00332458