Abstract
We use tunable UV laser light in the region 200–320 nm, produced by frequency doubling the output of a dye laser, for the decomposition of organometallic compounds. This method has been applied to TMA, trimethylaluminum Al(CH3)3. Only the TMA monomer absorbs UV light for λ >220 nm. TMA decomposes by one-photon absorption mainly into two channels: aluminum atoms Al plus organic fragments, and aluminummonomethyl AlCH3 molecules plus organic fragments. The ratio [Al]/[AlCH3] is wavelength dependent. We present a mechanism to explain the photolysis of trimethyl compounds of group III elements (Al, Ga, In).
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
T.F. Deutsch, D.J. Ehrlich, R.M. Osgood, Jr.: Appl. Phys. Lett. 35, 175 (1979)
D.J. Ehrlich, J.Y. Tsao: J. Vac. Sci. Technol. B 1, 969 (1983)
G.S. Higashi, C.G. Fleming: Appl. Phys. Lett. 48, 1051 (1986)
C. Jonah, P. Chandra, R. Bersohn: J. Chem. Phys. 55, 1903 (1971)
Y. Zhang, M. Stuke: J. Cryst. Growth 93, 143 (1988)
Y. Zhang, M. Stuke: Jap. J. Appl. Phys. 27, L1349 (1988)
Y. Zhang, M. Stuke: Chem. Phys. Lett. 149, 310 (1988)
Y. Zhang, Th. Beuermann, M. Stuke: Appl. Phys. B 48, 97 (1989)
S.A. Mitchell, P.A. Hackett: J. Chem. Phys. 79, 4815 (1983)
K. Ziegler, N.-R. Kroll, W. Larbig, O. Steudel: Ann. Chem. 629, 53 (1960)
R.W. Bigelow, J.G. Black, C.B. Duke, W.R. Salaneck, H.R. Thomas: Thin Solid Films 94, 233 (1982)
S. Okazaki: In Proceedings of the International Conference on Microlithography, Vienna 1988
K. Gamo, N. Takakura, N. Samoto, R. Shimizu, S. Namba: Jpn. J. Appl. Phys. 23, L239 (1984)
G.M. Shedd, H. Lezec, A.D. Dubner, J. Melngailis: Appl. Phys. Lett. 49, 1584 (1986)
W. Coburn, H.F. Winters, T.J. Chuang: J. Appl. Phys. 48, 3532 (1977)
T.M. Mayer, R.A. Barker, L.J. Whitman: J. Vac. Sci. Technol. B 4, 176 (1981)
R. Larciprete, M. Stuke: J. Phys. Chem. 90, 4586 (1986)
P. Lokai, B. Burkhardt, D. Basting, W. Mückenheim: Laser und Optoelektronik 3, 296 (1987)
C.H. Henrickson, D.P. Eyman: Inorg. Chem. 6, 1461 (1967)
Th. Beuermann, M. Stuke: Unpublished results
Th. Beuermann, M. Stuke: To be published
G. Pilcher, H.A. Skinner: In The Chemistry of the Metal-Carbon Bond, ed. by F.R. Hartley, S. Patai (Wiley, New York 1982) Vol. 1, p. 69
W.A. Goddard III, L.B. Harding: Ann. Rev. Phys. Chem. 29, 363 (1978)
Th. Beuermann, M. Stuke: To be published
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Beuermann, T., Stuke, M. Tunable UV laser photolysis of organometallics with product detection by laser mass spectroscopy: Trimethylaluminum. Appl. Phys. B 49, 145–148 (1989). https://doi.org/10.1007/BF00332274
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00332274