Abstract
Scattering microparticles were found to determine the characteristic behavior of the laser energy of discharge pumped XeCl excimer lasers with aluminium electrodes. All experimental results indicate that sputtered aluminium reacts with chlorine, a constituent of the laser gas, and forms aluminium chloride particles. Chlorine was observed to be formed by a reaction of oxygen, contained as an impurity, with the halogen donor hydrogen chloride under discharge conditions.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
R.C. Sze: IEEE J. QE-15, 1338–1347 (1979)
T.J. McKee, D.J. James, W.S. Nip, R.W. Weeks, C. Willis: Appl. Phys. Lett. 36, 943–945 (1980)
L. Burlamacchi, P. Burlamacchi, R. Salimbeni: Appl. Phys. Lett. 34, 33–35 (1979)
V.I. Donin, Ju.I. Khapov: Sov. J. Quantum Electron. 16, 1034–1088 (1986)
M.C. Gower, A.J. Kearsley, C.E. Webb: IEEE J. QE-16, 231–235 (1980)
R. Tennant: Laser Focus 17, 65–68 (1981)
W. Hans, P. Scott: Laser Focus 19, 86 (1983)
P.N. Mace: Opt. Eng. 20, 935–940 (1981)
G. Rilov, V. Sargsyan, M. Sharkhatunyan, T. Karapetyan: Abstracts III. National Conference “Lasers and their Applications”, Plovdiv, Bulgaria (Oct. 1988)
J. Lademann, R. König, Yu. Kudryavtsev, H. Albrecht, G. Fritsch, R. Grunwald, G. Winkelmann: Exp. Techn. Phys. 32, 235–246 (1984)
G. Mie: Ann. Phys. 25, 377 (1908)
S. Watanabe, A.J. Alcock, K.E. Leopold, R.S. Taylor: Appl. Phys. Lett. 38, 3–6 (1981)
A.B. Treshchalov, V.E. Peet, V.T. Mihkelsoo: IEEE J. QE-22, 51–57 (1986)
A.J. Allmand, R.G. Franklin: J. Chem. Soc. 1930, 2073–2092
J. Goldhar, W.R. Rapoport, J.R. Murray: IEEE J. QE-16, 235–241 (1980)