Abstract
It is shown that substitution of the spectral line intensity with the photoelectric optogalvanic signal in the hollow-cathode glow discharge enhances the ability for layer-by-layer spectral analysis of surfaces and layers. In particular, this approach improves substantially the thin-film thickness measurements and analysis accuracy.
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Djulgerova, R., Mihailov, V. Laser-assisted photoelectric optogalvanic analysis of thin films and surfaces using a hollow-cathode glow discharge. Appl. Phys. B 56, 301–305 (1993). https://doi.org/10.1007/BF00325220
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DOI: https://doi.org/10.1007/BF00325220