Abstract
A new method of the plasma chemical vapor deposition with the activation of the initial compounds by the plasma of the CO2 laser in the high-speed gas flow has been applied for the synthesis of silicon carbonitride SiCN films on a substrate of stainless steel and instrumental alloys using hexamethyldisilazane vapors. The preparation of the coatings of the laser-plasma deposition in the variants of the chamber and non-chamber deposition has been studied. The properties of the prepared coatings have been studied by the methods of IR and Raman spectroscopy, atomic-force microscopy, and XRD-analysis analysis. The studies of the structure of the films using diffraction synchrotron radiation showed that the prepared silicon carbonitride coatings are X-ray amorphous. The ratio of the Si-C/Si-N bonds in coatings increases with the increase in the substrate temperature. The microhardness of the prepared coatings on stainless steel substrates is 15–25 GPa.
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Smirnova, T.P., Badalyan, A.M., Borisov, V.O., Yakovkina, L.V., Kaichev, V.V., Shmakov, A.N., Nartova, A.V., Rakhlin, V.I., and Fomina, A.N., Plasma-enhanced chemical vapor deposition of silicon carbonitride films from volatile silyl derivatives of 1,1-dimethylhydrazine, High Energy Chem., 2003, vol. 37, no. 5, pp. 303–309.
Fainer, N.I., Kosinova, M.L., Rumyantsev, Yu.M., Maksimovskii, E.A., Kuznetsov, F.A., Kesler, V.G., Kirienko, V.V., Han Bao-Shan, and Lu Cheng, Synthesis and physicochemical properties of nanocrystalline silicon carbonitride films deposited by microwave plasma from organoelement compounds, Glass Phys. Chem., 2005, vol. 31, no. 4, pp. 427–432.
Grachev, G.N., Ponomarenko, A.G., Smirnov, A.L., Tischenko, V.N., and Tret’jacov, P.K., Producing of powerful optical pulsating discharge (POPD) by CO2 pulse periodic laser radiation in supersonic gas flow, Laser Phys., 1996, vol. 6, no. 2, pp. 235–240.
Bagaev, S.N., Grachev, G.N., Demin, V.N., Smirnov, A.L., Smirnov, P.Yu., and Smirnova, T.P., Laser-plasma method for the synthesis of superhard micro- and nanostructured coatings and devices, RF Patent 2416673, Byull. Izobret., 2011, no. 11, p. 2.
Bagayev, S.N., Grachev, G.N., Ponomarenko, A.G., Smirnov, A.L., Demin, V.N., Okotrub, A.V., Baklanov, A.M., and Onischuk, A.A., A new method of laser-plasma synthesis of nanomaterials: First results and prospects, Proc. SPIE-Int. Soc. Opt. Eng., 2007, pp. 6732–6736.
Grachev, G.N., Smirnov, A.L., Zimin, M.I., Myakushina, A.A., Demin, V.N., Okotrub, A.V., Baklanov, A.M., and Onishchuk, A.A., Laser plasmachemical facility for the synthesis of nanomaterials in high-rate gas flows, in Sbornik trudov tret’ei Vserossiiskoi konferentsii “Khimiya poverkhnosti i nanotekhnologiya,” S.-Peterbur-Khilovo, 2006 (Proceedings of the Third All-Russian Conference “Surface Chemistry and Nanotechnology,” St. Petersburg, Khilovo, Russia, September 24, 2006), St. Petersburg, 2006, p. 35.
Blaszczyk-Lezak, I., Wrobel, A.M., Aoki, T., Nakanishi, Y., Kucinska, I., and Tracz, A., Remote nitrogen microwave plasma chemical vapor deposition from a tetramethyldisilazane precursor: Growth mechanism, structure, and surface morphology of silicon carbonitride films, Thin Solid Films, 2006, vol. 497, nos. 1–2, pp. 24–34.
Ferrari, A.C. and Robertson, J., Interpretation of Raman spectra of disordered and amorphous carbon, Phys. Rev. B: Condens. Matter, 2000, vol. 61, no. 20, pp. 14095–14107.
Casiraghi, C., Piazza, F., Ferrari, A.C., Grambole, D., and Robertson, J., Bonding in hydrogenated diamond-like carbon by Raman spectroscopy, Diamond Relat. Mater., 2005, vol. 14, p. 1098.
Ferrari, A.C., Determination of bonding in diamond-like carbon by Raman spectroscopy, Diamond Relat. Mater., 2002, vol. 11, p. 1053.
Ferrari, A.C. and Robertson, J., Resonant Raman spectroscopy of disordered, amorphous, and diamond-like carbon, Phys. Rev. B: Condens. Matter, 2001, vol. 64, p. 75414.
Jönsson, B. and Hogmark, S., Hardness measurements of thin films, Thin Solid Films, 1984, vol. 114, pp. 257–269.
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Original Russian Text © V.N. Demin, T.P. Smirnova, V.O. Borisov, G.N. Grachev, A.L. Smirnov, M.N. Khomyakov, 2015, published in Fizika i Khimiya Stekla.
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Demin, V.N., Smirnova, T.P., Borisov, V.O. et al. Physical-chemical properties of silicon carbonitride films prepared using laser-plasma deposition from hexamethyldisilazane. Glass Phys Chem 41, 232–236 (2015). https://doi.org/10.1134/S1087659615020042
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DOI: https://doi.org/10.1134/S1087659615020042