Abstract
The results of studies on the fabrication and optimization of the configuration of magnetic-field sensors based on anisotropic magnetoresistive thin-film structures are described. Magnetic-field sensors with an odd characteristic and a sensitivity to 23.7 (mV/V)/(kA/m) and a 180° angle-rotation sensor with a signal amplitude of 15 mV/V are obtained. Based on the performed thermal tests, the possibility of applying the developed sensors in extreme environments in the temperature range from –60 to +150°C is shown, and the temperature-sensitivity coefficient amounts to –0.35%/°C. The obtained sensors are tested in angle, speed, and phase sensors in the automobile industry. The characteristics of the developed sensors correspond to the analogues of leading world firms.
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Original Russian Text © N.A. Djuzhev, N.S. Mazurkin, V.S. Pozdnyakov, A.S. Iurov, M.Yu. Chinenkov, 2015, published in Izvestiya vysshikh uchebnykh zavedenii. Elektronika, 2015, Vol. 20, No. 2, pp. 113–119.
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Djuzhev, N.A., Mazurkin, N.S., Pozdnyakov, V.S. et al. Magnetic-field sensors based on anisotropic magnetoresistive thin-film structures for operation in a wide temperature range. Semiconductors 49, 1739–1742 (2015). https://doi.org/10.1134/S1063782615130060
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DOI: https://doi.org/10.1134/S1063782615130060