Abstract
The structure of diamond-like silicon–carbon films formed on silicon substrates by magnetron and plasmatron codeposition using a closed-field magnetron and a plasmatron activated by tungsten cathode has been studied by transmission electron microscopy. The main feature of the films alloyed by vanadium to concentrations of 12–31 at % was found to be a layered structure of the film cross section. It was established that vanadium alloying leads to the formation of vanadium carbide (VC) nanocrystals; the nanocrystal size increases from 1–2 to 10 nm. At the maximum vanadium content, VC nanocrystals have an anisotropic shape: they are extended in the direction perpendicular to the film–substrate interface.
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Original Russian Text © O.M. Zhigalina, D.N. Khmelenin, S.M. Pimenov, M.L. Shupegin, I.G. Dyachkova, V.E. Asadchikov, 2018, published in Kristallografiya, 2018, Vol. 63, No. 5, pp. 778–783.
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Zhigalina, O.M., Khmelenin, D.N., Pimenov, S.M. et al. Structure of Diamond-Like Silicon–Carbon Films Alloyed by Vanadium. Crystallogr. Rep. 63, 796–801 (2018). https://doi.org/10.1134/S1063774518050334
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DOI: https://doi.org/10.1134/S1063774518050334