Abstract
The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.
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Original Russian Text © S.F. Belykh, A.D. Bekkerman, A.B. Tolstogouzov, A.A. Lozovan, D.J. Fu, 2018, published in Poverkhnost’, 2018, No. 1, pp. 40–45.
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Belykh, S.F., Bekkerman, A.D., Tolstogouzov, A.B. et al. Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions. J. Surf. Investig. 12, 33–37 (2018). https://doi.org/10.1134/S1027451018010056
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DOI: https://doi.org/10.1134/S1027451018010056