Abstract
Ion-beam methods are developed for forming supersmooth aspherical optical surfaces of polished fused quartz with a precision on the level of 3 nm relative to the standard deviation and 0.2–0.3 nm for the mean-square surface roughness in the range of spatial frequencies of 0.01–100 μm−1.
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Original Russian Text © M.V. Zorina, I.M. Nefedov, A.E. Pestov, N.N. Salashchenko, S.A. Churin, N.I. Chkhalo, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 8, pp. 9–15.
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Zorina, M.V., Nefedov, I.M., Pestov, A.E. et al. Precision aspherization of the surface of optical elements by ion-beam etching. J. Surf. Investig. 9, 765–770 (2015). https://doi.org/10.1134/S1027451015040394
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DOI: https://doi.org/10.1134/S1027451015040394