Abstract
The results of studying a silicon-germanium (Si-Ge) nanoheterostructure using refractive X-ray optics are described. The diffraction patterns near the silicon Bragg-diffraction peak 400 in the focal plane of refractive lenses are recorded and analyzed. The experiments are carried out in two different geometries: using 1D and 2D X-ray compound refractive lenses.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
N. Wermes, Nucl. Instrum. Methods Phys. Res. A 512, 277 (2003).
P. Zaumseil, Y. Yamamoto, A. Bauer, et al., J. Appl. Phys. 109, 023511 (2011).
A. Snigirev, V. Kohn, I. Snigireva, and B. Lengeler, Nature 384, 49 (1996).
M. Drakopoulos, A. Snigirev, I. Snigireva, and J. Schilling, Appl. Phys. Lett. 86, 014102 (2005).
A. Petukhov, J. Thijssen, and D. J. Hart, J. Appl. Crystallogr. 39, 137 (2006).
P. Ershov, S. Kuznetsov, I. Snigireva, et al., J. Appl. Crystallogr. 46, 1475 (2013).
A. Snigirev, I. Snigireva, G. Vaughan, et al., J. Phys.: Conf. Ser. 186, 012073 (2009).
H. Rücker, B. Heinemann, W. Winkler, et al., in Proceedings of IEEE Bipolar/BiCMOS Circuits and Technology Meeting BCTM, Oct. 12–14, 2009 (IEEE, 2009), p. 166.
J. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts and Company, Englewood, 2005).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © P.A. Ershov, S.M. Kuznetsov, I.I. Snigireva, V.A. Yunkin, A.Yu. Goikhman, A.A. Snigirev, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 6, pp. 55–59.
Rights and permissions
About this article
Cite this article
Ershov, P.A., Kuznetsov, S.M., Snigireva, I.I. et al. High-resolution X-ray diffraction based on 1D and 2D refractive lenses. J. Surf. Investig. 9, 576–580 (2015). https://doi.org/10.1134/S1027451015030234
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451015030234