Abstract
Dependences of the emission and fragmentation of sputtered Si + n clusters with n =1–11 on the oxygen pressure near the surface are studied using secondary-ion mass spectrometry under Xe+-ion bombardment of a silicon surface. It is shown that taking into account the mutual reversibility of reactions of formation and unimolecular decay, the formation of Si + n clusters under ion sputtering can be described within the framework of a mechanism of combinatorial synthesis.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
Rererences
A. Wucher, Mat. Fys. Medd. Dan. Vidensk. Selsk. 52, 405 (2006).
H. M. Urbassek and W. O. Hofer, Mat. Fys. Medd. Dan. Vidensk. Selsk. 43, 97 (1993).
I. S. Bitensky and E. S. Parilis, Nucl. Instrum. Methods Phys. Res. B 21, 26 (1987).
B. V. King, A. R. Ziv, S. H. Lin, and I. S. I. Tzong, Surf. Sci. 167, 18 (1986).
H. M. Urbassek and J. Michl, Nucl. Instrum. Methods Phys. Res. B 22, 480 (1987).
P. Können, A. Tip, and A. E. de Vries, Rad. Eff. 21, 269 (1974).
W. Gerhard, Z. Phys. B 22, 31 (1975).
N. Kh. Dzhemilev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 6, 654 (2012).
N. Kh. Dzhemilev, S. F. Kovalenko, S. E. Maksimov, O. F. Tukfatullin, and Sh. T. Khozhiev, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8, 254 (2014).
S. E. Maksimov, N. Kh. Dzhemilev, S. F. Kovalenko, O. F. Tukfatullin, and Sh. T. Khozhiev, Bull. Russ. Acad. Sci.: Phys. 78, 508 (2014).
N. Kh. Dzhemilev, S. E. Maksimov, and Sh. T. Khozhiev, in Proceedings of the 21st International Conference on Interaction of Ions with Surface VIP-2013, Yaroslavl, Russia, August 22–26, 2013 (2013), Vol. 1, p. 434.
A. D. Bekkerman, N. Kh. Dzhemilev, and V. M. Rotstein, Surf. Interf. Anal. 15, 587 (1990).
N. Kh. Dzhemilev, L. F. Lifanova, S. E. Maksimov, and Sh. T. Khozhiev, Poverkhnost’, No. 7, 68 (2006).
S. E. Maksimov, N. Kh. Dzhemilev, L. F. Lifanova, O. F. Tukfatullin, and Sh. T. Khozhiev, Poverkhnost’, No. 5, 54 (2008).
N. Kh. Dzhemilev, S. F. Kovalenko, L. F. Lifanova, S. E. Maksimov, and Sh. T. Khozhiev, Bull. Russ. Acad. Sci.: Phys. 72, 910 (2008).
A. D. Bekkerman, N. Kh. Dzhemilev, and V. M. Rotshtein, Izv. Akad. Nauk SSSR, Ser. Fiz. 54, 1339 (1990).
C.-E. Richter and M. Trap, Int. J. Mass Spectrom. Ion Processes 38, 21 (1981).
V. N. Kondrat’ev and E. E. Nikitin, Kinetics and Mechanism of Gas-Phase Reactions (Moscow, 1975) [in Russian].
Sputtering by Particle Bombardment I, Ed. by R. Behrisch (Springer, Berlin, 1981; Mir, Moscow, 1984).
P. J. Robinson and K. A. Holbrook, Unimolecular Reactions (Wiley, London, 1972).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © N.Kh. Dzhemilev, S.F. Kovalenko, S.E. Maksimov, O.F. Tukfatullin, Sh.T. Khozhiev, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 4, pp. 89–94.
Rights and permissions
About this article
Cite this article
Dzhemilev, N.K., Kovalenko, S.F., Maksimov, S.E. et al. On the unimolecular decay and mechanism of formation of Si + n cluster ions. J. Surf. Investig. 9, 400–405 (2015). https://doi.org/10.1134/S1027451015020275
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451015020275