Abstract
Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.
Article PDF
Similar content being viewed by others
Avoid common mistakes on your manuscript.
References
V. Sverdlov and S. Selberherr. Phys. Rep., 2015, 585,1.
D. D. Awschalom and M. E. Flatté. Nat. Phys., 2007, 3,153.
M. J. Mutch, P. M. Lenahan, and S. W. King. Appl. Phys. Lett., 2016, 109,1.
W. Liu, H. Zhang, J. A. Shi, et al. Nat. Commun., 2016, 7, 13497.
A. Gueddim, M. E. Madjet, S. Zerroug, et al. Opt. Quantum Electron., 2016, 48,551.
Y. Köseoglu. Ceram. Int., 2015, 41, 11655.
D. Saikia and J. P. Borah. J. Mater. Sci. Mater. Electron., 2017, 28, 8029.
N. I. Fainer, M. L. Kosinova, Y. M. Rumyantsev, et al. J. Phys. Chem. Solids, 2008, 69,661.
Y. Wang, T. Jiang, L. Zhang, et al. J. Am. Ceram. Soc., 2009, 92, 1603.
Y. Gou, X. Tong, Q. Zhang, et al. Ceram. Int., 2016, 42,681.
Q. Sun, K. Xu, J. W. Y. Lam, et al. Mater. Sci. Eng. C, 2001, 16,107.
Q. Sun, J. W. Y. Lam, K. Xu, et al. Chem. Mater., 2000, 12, 2617.
L. Wang, Q. Qi, P. Cai, et al. Scr. Mater., 2017, 126,11.
J. Kong, M. Kong, X. Zhang, et al. ACS Appl. Mater. Interfaces, 2013, 5, 10367.
A. Francis, E. Lonescu, C. Fasel, et al. Inorg. Chem., 2009, 48, 10078.
R. V. Pushkarev, N. I. Fainer, and K. K. Maurya. J. Struct. Chem., 2015, 56(6), 1176.
R. V. Pushkarev, N. I. Fainer, A. N. Golubenko, et.al. Glass Phys. Chem, 2016, 42,490.
R. V. Pushkarev, N. I. Fainer, and K. K. Maurya. Superlattices Microstruct., 2017, 102,119.
N. I. Fainer, R. V. Pushkarev, V. A. Shestakov, and A. K. Gutakovskii. J. Struct. Chem., 2017, 58(8), 1493.
A. N. Golubenko, M. L. Kosinova, V. A. Titov, et.al. Thin Solid Films, 1997, 293,11.
F. A. Kuznetsov, V. A. Titov, A. A. Titov, et al. Proc. Int. Symp. Adv. Mater., 1995,24.
N. I. Fainer, R. V. Pushkarev, A. N. Golubenko, et al. Glass Phys. Chem, 2015, 41,853.
N. I. Fainer, A. N. Golubenko, Yu. M. Rumyansev, et al. Glass Phys. Chem, 2009, 35,274.
N. Fainer, Yu. Rumyantsev, M. Kosinova, et al. Surf. Coat. Technol., 2007, 201, 9269.
Y. Awad., M. A. El Khakani, C. Aktik, et al. Surf. Coat. Technol., 2009, 204,539.
O. Baake, N. I. Fainer, P. Hoffmann, et al. Nucl. Instrum. Methods Phys. Res., Sect. A, 2009, 603,174.
R. Di Mundo, F. Palumbo, F. Fracassi, et al. Plasma Processes Polym., 2009, 6,506.
Y. Wang, L. Zhang, W. Xu, et. al. J. Am. Ceram. Soc., 2008, 91, 3971.
T. Varga, A. Navrotsky, J. L. Moats, et.al. J. Am. Ceram. Soc., 2007, 90, 3213.
S. Trassl, M. Puchinger, E. Rossler, and G. Ziegler. J. Eur. Ceram. Soc., 2003, 23,781.
O. Durand-Drouhin, M. Lejeune, M. Clin, and J. Henocque. Mater. Sci. Semicond. Process., 2001, 4,335.
R. Kurt, R. Sanjines, A. Karimi, and F. Levy. Diamond Relat. Mater., 2000, 9,566.
JCPDS International Center for Diffraction Data.1988. USA. Card no. 6–0696.
R. V. Pushkarev, N. I. Fainer, H. Katsui, et al. Mater. Des., 2018, 137, 422.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © 2018 N. I. Fainer, R. V. Pushkarev, S. B. Ehrenburg, S. V. Trubina, V. A. Shestakov, I. S. Merenkov, M. Terauchi.
Translated from Zhurnal Strukturnoi Khimii, Vol. 59, No. 7, pp. 1648–1655, September-October, 2018.
Rights and permissions
About this article
Cite this article
Fainer, N.I., Pushkarev, R.V., Ehrenburg, S.B. et al. Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane. J Struct Chem 59, 1588–1595 (2018). https://doi.org/10.1134/S0022476618070107
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0022476618070107