Abstract
The formation of a fluoropolymer coating by chemical deposition has been studied experimentally. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. Deposition conditions were analyzed, and the gas-dynamic parameters of the process were estimated. The estimates are consistent with experimental data.
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References
S. Ebnesajjad, Expanded PTFE Applications Handbook: Technology, Manufacturing and Applications (William Andrew, Norwich, 2017).
V. M. Buznik, “New Nano–and Micro–Sized Objects Based on Polytetrafluoroethylene,” Ross. Nanotekhnol. 4 (11/12), 35–42 (2009).
A. R. Betz, J. Jenkins, C. J. Kim, and D. Attinger, “Boiling Heat Transfer on Superhydrophilic, Superhydrophobic, and Superbiphilic Surfaces,” Int. J. Heat Mass Transfer 57, 733–741 (2013).
N. Miljkovic, R. Enright, and E. N. Wang, “Effect of Droplet Morphology on Growth Dynamics and Heat Transfer during Condensation on Superhydrophobic Nanostructured Surfaces,” ASC Nano 6, 1776–1785 (2012).
I. I. Gogonin, “The Effect ofWetting Angle on Heat Transfer at Boiling,” Teplofiz. Aeromekh. 17, No. 2, 261–267 (2010).
K. K. S. Lau, Yu Mao, H. G. Pryce Lewis, et al., “Polymeric Nanocoatings by Hot–Wire Chemical Vapor Deposition (HWCVD),” Thin Solid Films 501, No. 1/2 (2006). pp. 211–215; https://doi.org/10.1016/j.tsf.2005.07.208.
A. I. Safonov, V. S. Sulyaeva, E. Ya. Gatapova, et al., “Deposition Features and Wettability Behavior of Fluoropolymer Coatings from Hexafluoropropylene Oxide Activated by NiCr Wire,” Thin Solid Films 653, 165–172 (2018).
B. A. Cruden, K. K. Gleason, and H. H. Sawin, “Ultraviolet Absorption Measurements of CF2 in the Parallel Plate Pyrolytic Chemical Vapor Deposition Process,” J. Phys., D: Appl. Phys. 35, 480–486 (2002).
A. A. Rogachev, P. A. Luchnikov, and A. V. Rogachev, “Formation of Nanoscale Films from a Gas Phase at the Initial Stage of Growth,” Nanomater. Nanostrukt., No. 1, 35–44 (2010).
H. Yasuoka, M. Yoshida, K. Sugita, et al., “Fabrication of PTFE Thin Films by Dual Catalytic Chemical Vapor Deposition Method,” Thin Solid Films 516, 687–690 (2008).
A. I. Safonov, “Mass Spectrometry of Pyrolysis Products of Exafluoropropylene Oxide during Adiabatic Expansion of a Supersonic Jet,” Prikl. Mekh. Tekh. Fiz. 52 (3), 196–201 (2011) [J. Appl. Mech. Tech. Phys. 52 (3), 496–500 (2011)].
A. A. Uvarov and S. E. Aleksandrov, “Chemical Deposition of Polytetrafluoroethylene Films from Hexafluoropropylene Oxide,” Zh. Obshch. Khim. 83 (8), 1378–1384 (2013).
V. A. Dunyakhin, O. V. Kuricheva, V. V. Timofeev, and Yu. N. Zhitnev, “Decomposition of Hexafluoropropylene Oxide in a Strong IR Field,” Izv. Ross. Akad. Nauk, Ser. Khim., No. 11, 2077–2308 (1995).
A. Safonov, V. Sulyaeva, K. Kubrak, et al., “The Influence of Precursor Gas Pressure on Structure and Properties of Fluoropolymer Coatings by Hot Wire CVD,” EPJ Web Conf. 159 00042 (2017); DOI: 10.1051/epjconf/201715900042.
S. S. Kutateladze and V. M. Borishanskii, Handbook of Heat Transfer (Gosenergoizdat, Moscow–Leningrad, 1959) [in Russian].
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Original Russian Text © A.I. Safonov, V.S. Sulyaeva, A.L. Bogoslovtseva, N.I. Timoshenko.
Translated from Prikladnaya Mekhanika i Tekhnicheskaya Fizika, Vol. 59, No. 5, pp. 87–92, September–October, 2018.
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Safonov, A.I., Sulyaeva, V.S., Bogoslovtseva, A.L. et al. Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition. J Appl Mech Tech Phy 59, 842–846 (2018). https://doi.org/10.1134/S0021894418050103
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DOI: https://doi.org/10.1134/S0021894418050103