Abstract
The influence of laser annealing on structural transformation and electrical conductivity of amorphous non-stoichiometric SiOx thin films have been studied. It was found that the average sizes of silicon nanocrystals (NCs) increases from 6 nm in initial films up to 35 nm in modified one after structure transformation of SiOx film into nanocomposite SiO2(Si) one containing Si nanoclusters in oxide matrix after annealing by nanosecond pulses of the Nd+ 3: YAG laser irradiation with wavelengths of 1.064 μm and 0.532 μm. It has been shown that the size of the NCs and their size distribution depend on the intensity and wavelength of laser radiation.
The significant influence of laser annealing on electrical conductivity has been revealed and explained based on structural transformation of the film. It was shown that electron transport mechanism through SiOx films before and after laser annealing depend as on electric field and measurement temperature.
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References
Kizjak AY, Evtukh AA, Bratus OL et al (2022) Electron transport through composite SiO2(Si)&FexOy(Fe) thin films containing Si and Fe nanoclusters. J Alloys Compd 903:163892. https://doi.org/10.1016/j.jallcom.2022.163892
Koike R, Suzuki R, Katayama K, Higashihata M, Ikenoue H, Nakamura D (2021) Observation of SiO2 nanoparticle formation via UV pulsed laser ablation in a background gas. JLMN. https://doi.org/10.2961/jlmn.2021.03.2006
Mandal S, Gupta AK, Echeverria E et al (2022) Laser-assisted nanofabrication of multielement complex oxide Core-Shell nanoparticles. SSRN Journal. https://doi.org/10.2139/ssrn.4084712
Ruffino F, Grimaldi MG (2019) Nanostructuration of thin metal films by pulsed laser irradiations: a review. Nanomaterials 9:1133. https://doi.org/10.3390/nano9081133
Taheri M, Mansour N (2020) Silicon nanoparticles produced by two-step nanosecond pulsed laser ablation in ethanol for enhanced blue emission properties. Silicon 12:789–797. https://doi.org/10.1007/s12633-019-00168-8
Al-Kamal AK (2015) Synthesis of Ag-doped TiO2 NPs by Combining Laser Decomposition of Titanium Isopropoxide and Ablation of Ag For Dye-Sensitized Solar Cells. Master of Science thesis. The State University of New Jersey
Fedorenko LL, Prudnikov AM, Evtukh AA et al (2018) Laser-stimulated phase transformations in thin layers of SiOx and CNx –Ni. Mater Sci 54:223–229. https://doi.org/10.1007/s11003-018-0177-0
Steblova OV, Fedorenko LL, Evtukh AA (2017) Nanostructuring the SiOx layers by using laser-induced self-organization. Semicond Phys Quantum Electron Optoelectron 20(179–184):10.15407/spqeo20.02.179
Mott NF, Davis EA (1979) Electronic processes in non-cristalline materials. Oxford University Press, Oxford
Kizjak A, Evtukh A, Steblova O, Pedchenko Y (2016) Electron transport through thin SiO2 films containing Si nanoclusters. J Nano Res 39:169–177. https://doi.org/10.4028/www.scientific.net/JNanoR.39.169
Grillo A, Giubileo F, Iemmo L et al (2019) Space charge limited current and photoconductive effect in few-layer MoS 2. J Phys Conf Ser 1226:012013. https://doi.org/10.1088/1742-6596/1226/1/012013
Kao KC, Hwang W (1984) Electrical transport in solids. Pergamon Press, New York
Lampert MA, Schilling RB (1970) Current injection in solids: the regional approximation method. Semicond Semimetals 6:1–96. https://doi.org/10.1016/S0080-8784(08)62630-7
Sze SM (1981) Physics of semiconductor devices. John Wiley & Sons Inc., New York
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Pylypova, O., Antonin, S., Fedorenko, L. et al. Influence of Laser Annealing of Silicon Enriched SiOx Films on their Electrical Conductivity. Silicon 14, 12599–12605 (2022). https://doi.org/10.1007/s12633-022-01959-2
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DOI: https://doi.org/10.1007/s12633-022-01959-2