Abstract
In this study, an enhanced two-dimensional photonic crystal-based chemical sensor has been simulated to detect the concentrations of the two chemical substances sulfuric acid (H2SO4) and hydrogen peroxide (H2O2) using deionized water as a reference. The proposed structure is a ring resonator, consisting of circular silicon rods in air with a hexagonal array, and an overall size of 10 μm×11.5 μm in the X and Z directions, respectively. The simulated structure was proposed to have a consistent photonic band gap. The change in concentration affects the refractive index, which induces a shift in the resonance wavelength. The optical parameters are analyzed by the Finite Difference Time Domain method. The sensor performances, such as the sensitivity, the quality factor, the figure of merit, and the limit of detection were obtained and discussed. The results obtained are very promising and demonstrate the strong potential of the proposed sensor for chemical or biosensing applications. A maximum sensitivity of 1200 nm/RIU was achieved with the proposed sensor.
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The data presented in this study are available on request from the corresponding author.
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This work was supported by the Algerian ministry of higher education and scientific research.
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R.Z. carried out the simulations, wrote the paper, and prepared the original draft. R.Z., A.Z., C.Z., S.M., S.M., M.L.B., H.B. contributed to the organization of the paper, writing, and proofreading. All authors have read and agreed to the published version of the manuscript.
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Zegadi, R., Zegadi, A., Zebiri, C. et al. Enhanced 2D Photonic Crystal Sensor for High Sensitivity Sulfuric Acid (H2SO4) and Hydrogen Peroxide (H2O2) Detection. Silicon 14, 11001–11006 (2022). https://doi.org/10.1007/s12633-022-01836-y
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DOI: https://doi.org/10.1007/s12633-022-01836-y