Abstract
This paper concerns hysteresis and creep of a piezo-actuated nano positioning stage. The hysteresis and creep, considered as bounded disturbance or uncertainty, are suppressed without a nonlinear model. An improved Fuzzy Adaptive Sliding Mode Control (FASMC) with a Proportional-Integral-Derivative sliding surface is designed to cancel both hysteresis and creep. However, the constant slopes of the sliding function may increase oscillations. Some variable gains with adaptive rules are introduced to overcome this drawback by changing the sliding function values online. Fuzzy control is applied to tune the switching control part to improve performance. Furthermore, an adaptation law is used to approximate the optimal value of the switching control. The stability of the sliding mode control law is proved in the sense of Lyapunov stability theorem. To eliminate chattering and obtain a smooth signal, the switching control is modified and a smooth function is introduced to substitute the signum function. An anti-saturation control is introduced to keep the input voltage within safety scope. Experimental results show that FASMC can achieve faster response for step input and sinusoid signal. Both hysteresis and creep of the piezoelectric actuator are suppressed by the proposed FASMC. Therefore, the FASMC can reduce the tracking errors of the piezo-actuated stage.
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Jiwen Fang Jiwen Fang — received the Ph.D. degree in Xi’an Jiaotong University. He joined School of Mechanism Engineering, Jiangsu University of Science and Technology, China, in 2016. His research interest is motion control, the hysteresis compensating control of piezo-actuator and soft robot.
Lufan Zhang Lufan Zhang — received the Ph.D. degree in Xi’an Jiaotong University. He joined the School of Mechanic and Electrical Engineering, Henan University of Technology, Zhengzhou, China, in 2015. His research interest is mechanically design and optimization.
Zhili Long Zhili Long - received a B.S. degree and Ph.D. degree in mechanical engineering from Central South University, Hunan, China in 2003 and 2007, He has been working as associate professor in Harbin Institute of Technology Shenzhen Graduate School. His research interests include are machinery and equipment dynamics and vibration control, piezoelectric devices with ultrasonic system design and control, precision machine design and so on.
Michael Yu Wang Michael Yu Wang - received the Ph.D. degree in mechanical engineering from Carnegie Mellon University, Pittsburgh, PA, in 1989. Prof. Wang is currently working in the HongKong University of Science and Technology. He is a Fellow of ASME, HKIE and IEEE. His research interests include precision fixturing and grasping, particle vibration damping for electronics manufacturing, computational design and modeling, and development of 3D microstructures.
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Fang, J., Zhang, L., Long, Z. et al. Fuzzy Adaptive Sliding Mode Control for the Precision Position of Piezo-Actuated Nano Positioning Stage. Int. J. Precis. Eng. Manuf. 19, 1447–1456 (2018). https://doi.org/10.1007/s12541-018-0171-3
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DOI: https://doi.org/10.1007/s12541-018-0171-3