Abstract
Active researches on milli-structures and micro-machines have been conducted in advanced countries, and micro-machining technology is one of the core items of the researches. The current technical backgrounds of micro-machining can be divided into semiconductor-based machining, such as lithography and etching, and conventional mechanical machining such as cutting, grinding, and electro-spark machining. The former can be limited due to their materials or thickness, and the latter, while having good productivity, suffer from a less-than superior finishing surface. Therefore, the cutting work could be reasonable in terms of superior productivity and a greater degree of freedom. Conventional ultra-high-precision cutting technology can be used for surface machining, but it has not yet been used to produce ultra-fine components. Therefore, researches on the preparation of ultra-highprecision micro-components in three-dimensional spaces with the milling technique using a single crystal diamond bite are underway. In this study, finite element analysis (FEA) was used to determine the safety and control performance of the micro-stage for the design of an elastic-hinge-type stage using a piezo-electric element.
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Abbreviations
- Fm:
-
main cutting force
- Fr:
-
radial/thrust cutting force
- Fa:
-
feed cutting force
- N:
-
shape function
- â :
-
parameter
- B :
-
deformation rate matrix
- E:
-
Young’s modulus
- v :
-
Poisson ratio
- σ ij :
-
stress
- ε ij :
-
deformation rate
- f e :
-
applied force
- K e :
-
element rigidity matrix
- a e :
-
knot parameter
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Park, DK., Lee, GI., Gao, JC. et al. Research on the design of the ultra-high-precision positioning control error compensation. Int. J. Precis. Eng. Manuf. 17, 1351–1358 (2016). https://doi.org/10.1007/s12541-016-0160-3
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DOI: https://doi.org/10.1007/s12541-016-0160-3