Abstract
Residual vibration of system base due to high-speed motion of a stage may significantly reduce life span and productivity of the manufacturing equipment. Although a passive reaction force compensation (RFC) mechanism was developed to reduce residual vibration of a linear motor motion stage, the passive RFC mechanism should be redesigned according to variation of motion profiles. In this paper, we develop a fuzzy-P (proportional) controller of an active RFC mechanism to automatically tune the gain according to variation of motion profiles. First, frequency components of motion profiles for a linear motion stage are analyzed and performances of the passive RFC mechanism are approximately evaluated using a motion profile analysis. An active RFC mechanism with an additional control coil is introduced to overcome limitation of the passive RFC mechanism and a fuzzy rule is proposed to automatically tune the P controller of the active RFC mechanism according to variations of motion profiles. Simulations and experiments are performed to show effectiveness of the proposed fuzzy rule for tuning the P control gain of the active RFC mechanism.
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Abbreviations
- a M :
-
acceleration of mover
- c MT :
-
damping of magnet track
- k MT :
-
stiffness of magnet track
- k v :
-
viscous friction of mover
- k P :
-
gain of P control
- F f :
-
thrust force for mover friction
- F fc :
-
Column friction of mover
- F fs :
-
Stribeck friction of mover
- F m :
-
thrust force for mover motion
- F t :
-
thrust or reaction force
- F tran :
-
transmitted force
- m M :
-
mass of mover
- m MT :
-
mass of magnet track
- n :
-
index of frequency component
- n s :
-
Stribeck friction coefficient for exponential function
- n max :
-
index of frequency component at peak acceleration of mover
- n MT :
-
index of natural frequency of magnet track
- n’ MT :
-
output of defuzzification block
- T :
-
period of motion profile
- T a :
-
acceleration time
- T dw :
-
dwell time
- T r :
-
run time
- v s :
-
Stribeck friction coefficient for velocity
- x MT :
-
position of magnet track
- ẋ MT :
-
velocity of magnet track
- ẍ MT :
-
acceleration of magnet track
- ω :
-
frequency
- ω MT :
-
natural frequency of magnet track
- ω T :
-
fandamental frequency of motion profile
- ζ :
-
damping ratio
- θ n :
-
phase of magnet track motion
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Nguyen, D.C., Ahn, HJ. A Fuzzy-P controller of an active reaction force compensation (RFC) mechanism for a linear motor motion stage. Int. J. Precis. Eng. Manuf. 16, 1067–1074 (2015). https://doi.org/10.1007/s12541-015-0138-6
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DOI: https://doi.org/10.1007/s12541-015-0138-6