Abstract
Valveless micropump, important components of a microfluidic system, are widely used in biomedicine, chemical industry, microelectronics cooling and other fields. At present, the driving mode of micropump is mainly single drive, resulting in insufficient driving force and low output pressure. In this study, the overall structure of valveless micropump is designed, and the driving component and the internal inlet and outlet are compared and analyzed by finite element simulation. Moreover, the valveless micropump prototype is processed and developed for performance test. Results show that the output performance of the valveless micropump driven by piezoelectric and heating coupling is better than that of the piezoelectric micropump. When the ambient temperature was 20 °C, 140 V voltage and 40 Hz frequency were added to the piezoelectric component, as well as a 3A current to the heating plate. Furthermore, the liquid flow rate through the microneedle was 0.98 µl/s after a period of time.
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Acknowledgments
This work was partly supported by the National Natural Science Foundation of China (Nos. 62064008) and the Natural Science Foundation of Jiangxi province (Nos. 20202BABL 204041 and GJJ201927). The authors are also grateful to their colleagues for their essential contributions to this work.
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Shanshan Zhao received her Master’s degree from Nanchang Institute of Technology. Her research interests include MEMS medical devices and microneedle transdermal drug delivery technique.
Wenkang Zhao is a graduate from the School of Mechanical Engineering at Nanchang Institute of Technology. His research interests include MEMS medical devices and promoting drug delivery research.
Xiaoxiao Yan is an Associate Professor in the School of Mechanical Engineering at Nanchang Institute of Technology. He received his Ph.D. in Microelectronics and Solid-state Electronics from Shanghai Jiao Tong University. His research interests include MEMS medical devices and MEMS processes.
Xiaozhen Deng is an Associate Professor in the School of Mechanical Engineering at Nanchang Institute of Technology. She received her Ph.D. in Mechanical Design and Theory from Nanchang University. Her research interests include new technologies for polymer molding and MEMS technology.
Gang Tang is a Professor and Dean of the School of Mechanics at Nanchang Institute of Technology. He received his Ph.D. in Mechanical Engineering from Shanghai Jiao Tong University. His research interests include microenergy technology, smart sensors and actuators, and MEMS technology.
Yuwen Li is with the School of Electrical Engineering at Nanchang Institute of Technology. She received the M.S. degree in Instrument Science and Engineering from Nanchang University. Currently, she is pursuing a Ph.D. degree at the School of Machinery and Automation, Wuhan University of Science and Technology. Her research interests include medical imaging and machine learning.
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Zhao, S., Wang, X., Zhao, W. et al. Simulation and experiment of valveless micropumps driven by piezoelectric-heating coupling for microfluidics. J Mech Sci Technol 38, 4245–4253 (2024). https://doi.org/10.1007/s12206-024-0721-9
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DOI: https://doi.org/10.1007/s12206-024-0721-9